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Semiconductor Technology
1003-353X
2002 Issue 7
Analysis of Auger electron spectrum and infrared absorption spectra of the SiOxNy thin dielectric film formed by low temperature PECVD
chen pu sheng ; zhang zuo ; feng wen xiu ; liu jian ; liu xiao yang ; wang feng
..............page:73-76
Polishing rate and dependent factors of copper in HNO3 aqueous solution containing BTA during CMP
he han wei ; hu yue hua ; huang ke long
..............page:68-72,67
Degradation and annealing of amorphous silicon solar cell
lv bao tang ; zhao zuo ; zheng jun ; jia zhao bin ; zou bang tao
..............page:65-67
Mechanism of sulfur passivation effects in GaAs MESFET
xing dong ; li xiao bai ; liu li hao
..............page:61-64
The supervised circuit of integrated numeral temperature
zhang xue jun ; zeng yun
..............page:59-60,64
A 8-bit micro-controller with LCD driver
ju shui rong
..............page:53-58
Research and ASIC design of frame aligner in SDH system
he ying ; qu wan li ; luo jie
..............page:44-48
Control-driver system for a new type of FED based on CPLD
ni man ; zhang jun ; hu si zheng
..............page:39-43
CPLD design of the measure instrument of trunked logic unit
zhao yi ; mou tong sheng ; liu qing jiang
..............page:36-38,48
Implementation of PCI bus arbiter using CPLD
kang dong ming ; li tong ; ding you zhi ; yang zhen xi ; xie bing
..............page:33-35
Practical application and product development on bluetooth technology
shen lian feng ; song tie cheng ; xu ping ping ; song yang ; hu jing
..............page:29-32,43
A new surface-planarization technology for isolation structure
wang zhe ; cheng xu ; kang bao wei ; wu yu ; wang yu zuo
..............page:26-28
Function of HF solution in new cleaning technique
cao bao cheng ; yu xin hao ; ma hong lei ; zhang qing kun
..............page:23-25
Chemomechanical polishing technique of silicon substrate in ULSI
di wei guo ; liu yu ling ; si tian hua
..............page:18-22
di dian ya di gong hao gao su a/d zhuan huan qi ji qi ying yong qian jing
li yan xu ; cheng li ; ba da zhi
..............page:6-9