Semiconductor Technology 2009 Issue 12 Research and Development of Chemical Mechanical Polishing Slurry

Research and Development of Chemical Mechanical Polishing Slurry
lu zhong ; chen yang

..............page:1157-1161,1239

zong he xin wen

..............page:1251

Application of Dual-Direction Si Controlled Rectifier Device for on-Chip ESD Protection
li liang ; zhu ke han

..............page:1195-1199

ban dao ti ji shu gao yue ji tou gao ge shi

..............page:1252

300 mm Si Wafer Manufacture and New Development
ku li ming ; zuo zhi rui ; suo si zhuo ; zhou qi gang

..............page:1153-1156

Design of a Low-Noise Readout Circuit for MEMS Inertial Devices
li jin peng ; jiao ji wei ; zuo bin wei ; zhang ying ; wang yue lin

..............page:1162-1165

Low Temperature Fabrication and Characterization of ZnO Nanorods
li yu jie ; zhang hai ming ; hu guo feng ; li xiao jie ; gao bo ; zhu yan jun

..............page:1170-1172,1176

Mechanism and Process of Cu-Sn Bonding for Wafer Level MEMS Packaging
rong yi bo ; cai jian ; wang shui di ; jia song liang

..............page:1181-1184

Evaluation of Dislocation Densities in GaN Epilayers by Wet Chemical Etching
cao ming xia ; yu guang hui ; wang xin zhong ; lin chao tong ; lu hai feng ; gong hang

..............page:1205-1208

UHF Master-Slave Coupled LC VCO with Two Bandwidthes
ma lin jun ; yang ning ; zhou xiao di ; cheng li ; yan xue ping

..............page:1224-1226,1247

Wet UBM Etching and Bump Undercut Control
chen bo ; chen zuo ; gu de jun

..............page:1209-1212

Design of GaAs MMIC Broadband Doubly-Balanced Mixer
zhao yu ; wu hong jiang ; gao xue bang ; wang shao dong

..............page:1220-1223

Effect of Grain Size of Grinding Wheel on Surface Topography
zuo zhi rui ; tang xing chang ; ge zhong ; chen hai bin ; zhang guo hu

..............page:1200-1204

Application of Calibration Method to the Optic Spectrum Line of Linear InGaAs
tao ; zhang xia

..............page:1192-1194,1223

ye jie dong tai

..............page:1250-1251

8 bit 250 MS/s Pipelined ADC with 60 dB SFDR in 0.13μm CMOS
wan pei yuan ; fang di ; cui wei ;john yu; lin ping fen

..............page:1240-1243

Design of a 12 bit 80 MS/s CMOS Pipelined ADC
shi feng ; li dong mei

..............page:1235-1239

fei si ka er shu zi xin hao kong zhi qi yi di cheng ben ti gong di gong hao he gao xing neng

..............page:1248-1249

Design of CMOS Wildar Bandgap Voltage Reference with High Precision Multi-Output
wang yong shou ; wu jin ; zheng li xia ; zhao xia

..............page:1244-1247

Chemical Coloration Method for Measuring the Diffused-Junction Width of B, Al and P Atom
zuo li ying ; zhao quan ; shi ji xiang ; wang cong ; li ya guang

..............page:1213-1215

Methodology for Prompt and Low Cost ESD Test
feng jun hong ; jian wei ting ; zhang rong zhe

..............page:1216-1219

Study on Low Temperature Glass Frit Bonding for MEMS Device
yu guo ping ; wang ming xiang ; yu guo qing

..............page:1173-1176

Design of a 60 GHz 11 dBm CMOS Power Amplifier
guo chao ; zhang wen jun ; yu zhi ping

..............page:1231-1234

Electromechanical Coupled Model on 2DEG in AlGaN/GaN HEMT
lan li guang ; zhang zhi guo ; yang rui xia ; feng zhi hong ; cai shu jun ; yang ke wu

..............page:1185-1188,1204

Study on HF Vapor-Phase Etching for Suspended Nano Structure Fabrication
zhang wei ; liu ze wen

..............page:1166-1169

Novel Piezoresistive Accelerometer with L-Shaped Spring Legs
gao ting jin ; xiong bin

..............page:1177-1180

Simulation and Design of an Improved BiCMOS Band-Gap Reference
zhou yang ; cheng li ; zhang lei ; zhang jing ; ni xue mei ; wang zhen yu

..............page:1227-1230

High Efficiency Organic Light Emitting Devices with Low-Voltage and High Carriers Balance
wei fu xiang ; jiang xue yin ; zhang zhi lin

..............page:1189-1191,1234