..............page:5-9,44
..............page:14-17,35
Proximity effects during mask fabrication
du jing-lei 1 ; shi rui-ying 2 ; cui zheng 3 ; guo yong-kang 1(1.physics department ; sichuan university; chengdu610064; china; 2.microelectronics r&d center; the chinese academy of scienes; beijing100029; china; 3.rutherford appleton laboratory; chilton; didcot; oxon ox110qx; uk)
..............page:36-40