1001-5507
2002 Issue 2
MEMS technology in RF /microwave wireless systems
yun zhen-xin(state owned no.970factory; chengdu610051; china)
yun zhen-xin(state owned no.970factory; chengdu610051; china)
..............page:6-11
na mi qi jian yu dan dian zi jing ti guan ( xu )
wang tai hong
wang tai hong
..............page:12-14,17
Development of monodispersed colloidal latex,colloidal crystal and three-dimensional or dered periodic material
chen zu-yao; hao ling-yun; jiang wan-quan; hu yuan (university of science and technology of china state key laboratory of fire science; structure analysis laboratory; department of chemistry; hefei230026; china)
chen zu-yao; hao ling-yun; jiang wan-quan; hu yuan (university of science and technology of china state key laboratory of fire science; structure analysis laboratory; department of chemistry; hefei230026; china)
..............page:22-28,45
Preparation and application of nanometer TiO_2 composite particles
yang yi ; li feng-sheng (superfine powder institute of nanjing university of sci.&tech.; nanjing210094; china)
yang yi ; li feng-sheng (superfine powder institute of nanjing university of sci.&tech.; nanjing210094; china)
..............page:18-21
Study on sub-half-micron Cr mask fabricating technology
wang wei-jun; luo si-wei; jiang ze-liu; liu yu-gui (hebei semiconductor research institute; shijiazhuang050051; china)
wang wei-jun; luo si-wei; jiang ze-liu; liu yu-gui (hebei semiconductor research institute; shijiazhuang050051; china)
..............page:43-45
Deep sub-micron ULSI process measurement :Scanning probe microscope technology
wang jia-ji; tang ling (the national micro analysis centre; fudan university; shanghai200433; china)
wang jia-ji; tang ling (the national micro analysis centre; fudan university; shanghai200433; china)
..............page:38-42
Design of untouched-mode pressure micro sensor
chu dan-lei (dept.of mechanic and electrical engineering xiamen univ.; xiamen361005; china)
chu dan-lei (dept.of mechanic and electrical engineering xiamen univ.; xiamen361005; china)
..............page:34-37
Development of nano-scale devices
wang zhan-guo (key laboratory of semiconductor materials science; institute of semiconductors; chinese academy of sciences; beijing100083; china)
wang zhan-guo (key laboratory of semiconductor materials science; institute of semiconductors; chinese academy of sciences; beijing100083; china)
..............page:1-5
..............page:48
PHEMT material and device
xie zi-li; qiu kai; yin zhi-jun; fang xiao-hua; chen jian-lu; wang xiang-wu; chen tang-shen g; gao jian-feng (nanjing electronic device institute; nanjing210016; china)
xie zi-li; qiu kai; yin zhi-jun; fang xiao-hua; chen jian-lu; wang xiang-wu; chen tang-shen g; gao jian-feng (nanjing electronic device institute; nanjing210016; china)
..............page:15-17
Silicon gratings made by microfabrication technology
ju hui ; wu yi-hui (changchun institute of optics and fine mechanics and physics; chinese academy of sciences; changchun130022; chi na) wang li-ding (dalian university of technology; dalian116000; chinan)
ju hui ; wu yi-hui (changchun institute of optics and fine mechanics and physics; chinese academy of sciences; changchun130022; chi na) wang li-ding (dalian university of technology; dalian116000; chinan)
..............page:29-33
..............page:46
..............page:47