..............page:26-28,38
Bio-chip scanner
zhang qiang; hu song; liu ye-yi (institute of optics&electronics of chinese academy of sciences; chengdu610209; china)
..............page:43-45
Reliability technology of MEMS
feng ya-lin 1 ; li li 2 ; li ji-hong 2 ; hao yi-long 1(1.inst.of microelectronics; beijing univ.; beijing100871; china; 2.the9th group; p.o.box no .122; beijing100036; china)
..............page:29-32
Study of interferometric lithography without masks
feng bo-ru 1 ; zhang jin 1; 2 ; zong de-rong 1 ; jiang shi-lei 1 ; su ping 1; 2 ; chen bao-qin 3 ; chen fen 4(1.state key lab of optical technologies for microfabrication; institute of optics&electronics; chinese academy of s
..............page:39-42
IT-MEMS technology
zhao zheng-ping; yang yong-jun (13th insitute of mii; shijiazhuang; 050051; china)
..............page:6-11,45
..............page:2-5,32