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Semiconductor Information
1001-5507
2002 Issue 4
ye jie kuai xun
..............page:44-47
Si single-electron transistor with in-plane point-contact metal gates
sun jin-peng; wang tai-hong (institute of physics; chinese academy of sciences; beijing100080; china)
..............page:8-10,36
Solid state nanoelectronic device and molecular electronic device
guo wei-lian (school of electronic information eng.; tianjin univ.tianjin300072; china)
..............page:1-7
Single-electron transistor and its fabrication
guo hui ; guo wei-lian; zhang shi-lin; liang hui-lai (college of electronic information engineering; tianjin university; tianjin300072; china)
..............page:11-18
Influence of substrate temperature of nanocrystalline SnO_2 thin films
wang zhan-he; jiang yun-chen; zhu kan (department of electronics engineering; beijing institute of technology; beijing100081; china)
..............page:19-21
Application of DUV deep lithography in LIGA process
yu guo-bin; yao han-min; hu song; chen xing-jun (institute of optics and electronics; chinese academy of sciences; chengdu610209; china)
..............page:30-32
Preparation nanometer Si clusters by RF magnetron sputtering tech nique
ma zhen-chang; zong wan hua (hebei semiconductor research institute; shijiazhuang050051; china) heng cheng-lin; qin guo-gang (department of physics; beijing university; beijing100871; china) wu zheng-long (the beijing normal university; beijing100
..............page:22-24,29
Prime study of an electromagnetic microrelay fabricated by UV-LIGA technology
zhang peng; liu gang; tian yang-chao (national synchrotron radiation laboratory university of science and technology of china; hefei230029; china)
..............page:33-36
Carbon nanotube and its fabrication technology
zhang chen (the46th electronic research institute; tinjin300192; china)
..............page:25-29
A new type of projection electron beam lithography with angular limitation
gu wen-qi ; zhang fu-an (institute of electrical engineering; chinese academy of sciences; beijing100080; china)
..............page:37-41
Applications of process technology of EB direct-writing gate and T-shape gate
liu yu-gui ; wang wei-jun; luo si-wei; jiang ze-liu (hebei semiconductor research institute; shijiazhuang050051; china)
..............page:42-43