..............page:24-26,29
Applications of μTM in MEMS
chen mo 1; 3 ; zheng xiao-lin 1; 2 ; fan hua 1 ; li jin 3(1.biomems lab of microsystem research centre of cqu; chongqing400044; china; 2.the otes laboratory of cqu; chongqing400044; china; 3.laboratory on biomechanics&biorheology under the state education commission; chongqing400044; china)
..............page:30-33