1001-5507
2003 Issue 4
Research and development of in-situ measurement on mechanical parameters in MEMS field
jiang yan-feng 1 ; huang qing-an 2(1.microelectronic center; college of information engineering; north china university of technology; beijing100041; china; 2.mems key laboratory in ministry of education; department of electrical engineering; southeast uni versity; nanjing210096; china)
jiang yan-feng 1 ; huang qing-an 2(1.microelectronic center; college of information engineering; north china university of technology; beijing100041; china; 2.mems key laboratory in ministry of education; department of electrical engineering; southeast uni versity; nanjing210096; china)
..............page:34-39
MEMS-IDT surface acoustic wave gyro
l zhi-qing; hu ai-min (sichuan institute of piezoelectric and acoustooptics technology; chongqing400060; china)
l zhi-qing; hu ai-min (sichuan institute of piezoelectric and acoustooptics technology; chongqing400060; china)
..............page:27-29,33
Research on preparation of Cu/Mo compound powder by hydro gen reducing Cu/Mo compound
li zai-yuan; zhai yu-chun; tian yan-wen; wang tian-ran (school of material and metallurgy; northeastern university; shenyang110004; china)
li zai-yuan; zhai yu-chun; tian yan-wen; wang tian-ran (school of material and metallurgy; northeastern university; shenyang110004; china)
..............page:23-26
..............page:1
Analysis of thermos-field distribution characteristics in vertical-cavity surface emitting lasers
liu li-xin; zhao hong-dong; cao meng (school of information engineering; hebei university of technology; tianjin300130; china)
liu li-xin; zhao hong-dong; cao meng (school of information engineering; hebei university of technology; tianjin300130; china)
..............page:8-11
..............page:26
Characteristic and application of polyimide in MEMS
deng jun-yong 1 ; feng yong-jian 2(1.department of mechanical&electronic engineering; xiamen university; xiamen361005; china; 2.pen tung sah mems research center of xiamen university; xiamen361005; china)
deng jun-yong 1 ; feng yong-jian 2(1.department of mechanical&electronic engineering; xiamen university; xiamen361005; china; 2.pen tung sah mems research center of xiamen university; xiamen361005; china)
..............page:30-33
..............page:45-48
Application of planar photonic-bandgap structure in microwave&millimeter-wave IC
zhang wen-mei 1; 2 ; li xiao-wei 2 ; mao jun-fa 1 ; sun xiao-wei 2(1.shanghai jiaotong university; shanghai200030; china; 2.shanghai institute of microsystem and information technology chi nese academy of sciences; shanghai200050; china)
zhang wen-mei 1; 2 ; li xiao-wei 2 ; mao jun-fa 1 ; sun xiao-wei 2(1.shanghai jiaotong university; shanghai200030; china; 2.shanghai institute of microsystem and information technology chi nese academy of sciences; shanghai200050; china)
..............page:12-17,44
90nm process and its relevant technology
weng shou-song (wuxi luo te electronic co.; ltd; wuxi214002; china)
weng shou-song (wuxi luo te electronic co.; ltd; wuxi214002; china)
..............page:40-44
A new technique for fabrication of nanodevices-nanoimprint lithography
liang ying-xin; wang tai-hong (institute of physics; chinese academy of sciences; beijing100080; china)
liang ying-xin; wang tai-hong (institute of physics; chinese academy of sciences; beijing100080; china)
..............page:2-7
Preparing thick-film sensitive ceramic material with nano-powders
wang meng-kui 1 ; wang zhi-fan 1 ; liu wen-lei 2(1.department of physics; jinzhou normal college; jinzhou121003; china; 2.dandong guotong electronic component limited company; dandong118002; china)
wang meng-kui 1 ; wang zhi-fan 1 ; liu wen-lei 2(1.department of physics; jinzhou normal college; jinzhou121003; china; 2.dandong guotong electronic component limited company; dandong118002; china)
..............page:18-22,26