1001-5507
2003 Issue Z1
Synthesis of dimethyl carbonate by ultrafine particle catalysts
jiang qi ; wang shu ming (department of chemical engineering; south china university of technology; guangzhou 510640; china)
jiang qi ; wang shu ming (department of chemical engineering; south china university of technology; guangzhou 510640; china)
..............page:496-498
Fabrication and experiment of a MEMS based cold gas thruster
tang fei; ye xiong ying; zhou zhao ying (dept.of precision instruments; tsinghua university; beijing 100084; china)
tang fei; ye xiong ying; zhou zhao ying (dept.of precision instruments; tsinghua university; beijing 100084; china)
..............page:441-444
Investigation of PZT piezoelectric thick-film made by screen printing compatible with MEMS
wang wei; liu xiao wei; mo bing; wang juan (mems center; harbin institute of technology; harbin 150001; china)
wang wei; liu xiao wei; mo bing; wang juan (mems center; harbin institute of technology; harbin 150001; china)
..............page:432-434
A new touch mode capacitive pressure sensor with two deformable diaphragms
jiao yu zhong (state key lab of optical technologies for microfabrication; institute of optics and electronics; chinese academy of sciences; chengdu 610209; china)
jiao yu zhong (state key lab of optical technologies for microfabrication; institute of optics and electronics; chinese academy of sciences; chengdu 610209; china)
..............page:492-495
The out-of-chip mechanical method for actuating MEMS parts
wang hao; yao han min; du chun lei; jiao yu zhong (state key lab of optics technologies for microfabrication; institute of optics and electronics; chinese academy of sciences; chengdu 610209; china)
wang hao; yao han min; du chun lei; jiao yu zhong (state key lab of optics technologies for microfabrication; institute of optics and electronics; chinese academy of sciences; chengdu 610209; china)
..............page:477-480
Design and fabrication of CMOS-compatible polysilicon diaphragms for pressure sensor applications
zhou min xin; qin ming; huang qing an (key laboratory of mems of education ministry; southeast university; nanjing 210096; china)
zhou min xin; qin ming; huang qing an (key laboratory of mems of education ministry; southeast university; nanjing 210096; china)
..............page:470-473
Research of SU-8 photoresist micro-actuator
qin ning; zhao zhan; chen shao feng; xia shan hong (state key laboratory of transducer technology; institute of electronics; china academy of sciences; beijing 100080; china)
qin ning; zhao zhan; chen shao feng; xia shan hong (state key laboratory of transducer technology; institute of electronics; china academy of sciences; beijing 100080; china)
..............page:474-476
A novel integrated humidity sensor compatible with CMOS
gu lei; qin ming; huang qing an (key lab of mems of education ministry; southeast university; nanjing 210096; china)
gu lei; qin ming; huang qing an (key lab of mems of education ministry; southeast university; nanjing 210096; china)
..............page:461-463,466
Trace explosive detection with chemical sensor,biosensor and MEMS sensor techniques
zhang cheng mei; mei tao; kong de yi; zhang yan (state key laboratory of transducer technology; institute of intelligent machines; chinese academy of sciences; hefei 230031; china)
zhang cheng mei; mei tao; kong de yi; zhang yan (state key laboratory of transducer technology; institute of intelligent machines; chinese academy of sciences; hefei 230031; china)
..............page:481-483,491
An electromagnetically actuated miniature valve for high pressure control
fan rui li; li yong; chen xu peng; ye xiong ying; zhou zhao ying (department of precision instruments and mechanology; tsinghua university; beijing 100084; china)
fan rui li; li yong; chen xu peng; ye xiong ying; zhou zhao ying (department of precision instruments and mechanology; tsinghua university; beijing 100084; china)
..............page:452-455,460
Study on the temperature compensation method of piezoresistance silicon film sensor
guo tao; shi yun bo; zhang wen dong (the ministry education key lab for instrumentation science & dynamic measurement; department of electronic engineering; north china institute of technology; taiyuan 030051; china)
guo tao; shi yun bo; zhang wen dong (the ministry education key lab for instrumentation science & dynamic measurement; department of electronic engineering; north china institute of technology; taiyuan 030051; china)
..............page:489-491
Evaluation of the onset voltage of a micro fabrication colloid thruster
xiong ji jun; zhou zhao ying; ye xiong ying; wang xiao hao (dept.of precision instruments; tsinghua university; beijing 100084; china)
xiong ji jun; zhou zhao ying; ye xiong ying; wang xiao hao (dept.of precision instruments; tsinghua university; beijing 100084; china)
..............page:445-448
A target indirect measurement method of microthrust
tang fei; ye xiong ying; zhou zhao ying (dept. of precision instruments; tsinghua university; beijing 100084; china)
tang fei; ye xiong ying; zhou zhao ying (dept. of precision instruments; tsinghua university; beijing 100084; china)
..............page:438-440,444
Laser locally heating and bonding for microsystem packaging
lai jian jun; chen xi qu; zhou hong; liu sheng; yi xin jian (institute of microsystem; huazhong university of science and technology; wuhan430074; china)
lai jian jun; chen xi qu; zhou hong; liu sheng; yi xin jian (institute of microsystem; huazhong university of science and technology; wuhan430074; china)
..............page:257-260
Study on the AFM-based micro-machined silicon surface
zhao qing liang; liang ying chun; cheng kai; dong shen (precision engineering research institute; harbin institute of technology; harbin150001; china)
zhao qing liang; liang ying chun; cheng kai; dong shen (precision engineering research institute; harbin institute of technology; harbin150001; china)
..............page:261-264,266
Three-dimensional micromaching on Cu——application of confined etchant layer technique (CELT)
liu zhu fang 1; jiang li min 1; tang jing 1; zhang li 1; tian zhao wu 1; liu pin kuan 2; qu dong sheng 2; sun li ning 2; ye xiong ying 3; zhou zhao ying 3; tian zhong qun 1 (1. state key laboratory for physical chemistry of solid surfaces; department of chemistry; xiamen university; xiamen361005; china; 2. the institute of robots; harbin institute of technology; harbin; 150001; china; 3. dept of precision instruments; tsinghua university; beijing100084; china)
liu zhu fang 1; jiang li min 1; tang jing 1; zhang li 1; tian zhao wu 1; liu pin kuan 2; qu dong sheng 2; sun li ning 2; ye xiong ying 3; zhou zhao ying 3; tian zhong qun 1 (1. state key laboratory for physical chemistry of solid surfaces; department of chemistry; xiamen university; xiamen361005; china; 2. the institute of robots; harbin institute of technology; harbin; 150001; china; 3. dept of precision instruments; tsinghua university; beijing100084; china)
..............page:265-266
Micromachined accelerometer based on resonant principle
jia yu bin 1; hao yi long 1; zhong ying 2; zhang rong 3 (1. institute of microelectronics; peking university; beijing 100871; china; 2. precision measurement technology and instrument; tianjin university; tianjin 300072; china; 3. precision measurement technology and instrument; tsinghua university; beijing 100084; china)
jia yu bin 1; hao yi long 1; zhong ying 2; zhang rong 3 (1. institute of microelectronics; peking university; beijing 100871; china; 2. precision measurement technology and instrument; tianjin university; tianjin 300072; china; 3. precision measurement technology and instrument; tsinghua university; beijing 100084; china)
..............page:271-273
Design of comb-driving micro-silicon accelerometers based on structure parameters
liu zong lin; wu xue zhong; li sheng yi (mems research center of n.u.d.t. ; changsha 410073; china)
liu zong lin; wu xue zhong; li sheng yi (mems research center of n.u.d.t. ; changsha 410073; china)
..............page:277-280
Design of micromachined gyroscope with electromagnetic actuation and capacitive detection
song zhao hui ; jia meng jun ; li xin xin (state key laboratory of transducer technology; institute of microsystem and information technology; chinese academy of sciences; shanghai 200050; china)
song zhao hui ; jia meng jun ; li xin xin (state key laboratory of transducer technology; institute of microsystem and information technology; chinese academy of sciences; shanghai 200050; china)
..............page:309-311
Study of vacuum packaging and vacuum level testing technologies of MEMS packaging
zhang li hua; li jun; shao chong jian (the 13th research institute; cetc; shijiazhuang 050051; china)
zhang li hua; li jun; shao chong jian (the 13th research institute; cetc; shijiazhuang 050051; china)
..............page:267-270
Design and experiment research of integrated capillary electrophoresis chip
tian li 1; liu xiao wei 1; wang xi lian 1; tian lei 2; ao ming sheng 1; xiong jun 1 (1. mems center; harbin institute of technology; harbin 150001; china; 2. the 49th research institute; cetc ; harbin 150001; china)
tian li 1; liu xiao wei 1; wang xi lian 1; tian lei 2; ao ming sheng 1; xiong jun 1 (1. mems center; harbin institute of technology; harbin 150001; china; 2. the 49th research institute; cetc ; harbin 150001; china)
..............page:340-343
Design of a micromechanical inclinometer with two strained silicon beams
kong de yi; zhang tao; mei tao; ni lin; sun fei; tao yong chun (state key laboratory of transducer technology; institute of intelligent machines; chinese academy of sciences; hefei 230031; china)
kong de yi; zhang tao; mei tao; ni lin; sun fei; tao yong chun (state key laboratory of transducer technology; institute of intelligent machines; chinese academy of sciences; hefei 230031; china)
..............page:302-304
Effect of process stress on resonance frequency of the double linear vibratory gyroscope
xie ming mei; qiu an ping; wang shou rong (instrument science and engineering department; southeast university; nanjing 210096; china)
xie ming mei; qiu an ping; wang shou rong (instrument science and engineering department; southeast university; nanjing 210096; china)
..............page:314-316
Research of microchip capillary electrophoresis laser-induced fluorescence detection system
chen dong; yan wei ping; hao ying guang; ma ling zhi (department of electronic engineering; dalian university of technology; dalian; 116024; china)
chen dong; yan wei ping; hao ying guang; ma ling zhi (department of electronic engineering; dalian university of technology; dalian; 116024; china)
..............page:324-327
Research on reliability of the MEMS convective accelerometer
yang yong jun 1; lin hai feng 1; shi qian 2; xu ai dong 1 (1. 13th institute; cetc; shijiazhuang 050051; china; 2. china electronic product reliability and environmental testing institute; guangzhou 510610; china)
yang yong jun 1; lin hai feng 1; shi qian 2; xu ai dong 1 (1. 13th institute; cetc; shijiazhuang 050051; china; 2. china electronic product reliability and environmental testing institute; guangzhou 510610; china)
..............page:317-320
Dynamics analysis and imitation of silicon micro-machined gyroscope using for circumrotation carrier
wang hong wei; zhu jia jin; zhang wei; zhang fu xue (research centre of sensor technology; beijing information technology institute; beijing 100010; china )
wang hong wei; zhu jia jin; zhang wei; zhang fu xue (research centre of sensor technology; beijing information technology institute; beijing 100010; china )
..............page:284-288
Fabrication and thermal analysis of microchamber in PCR biochip
liu da zhen 1; yan wei ping 1; guo ji hong 2; du li qun 2 (1.dept of electronic engineering; 2.research center for microsystem technology; dalian university of technology; dalian 116023; china)
liu da zhen 1; yan wei ping 1; guo ji hong 2; du li qun 2 (1.dept of electronic engineering; 2.research center for microsystem technology; dalian university of technology; dalian 116023; china)
..............page:321-323,327
Design and fabrication of microheater array for MEMS wafer-level scale hermetic package
chen si hai 1; chen ming xiang 2; yi xin jian 2; liu sheng 3; zhang hong hai 3; huang zhu lin 3; wang xue fang 3; wang zhi yong 3 (1. state key laboratory of laser technology; huazhong university of science and technology; wuhan430074; china; 2. dept. of optoelectronic engineering; huazhong university of science and technology; wuhan430074; china; 3. research institute of microsystem; huazhong university of science and technology; wuhan430074; china)
chen si hai 1; chen ming xiang 2; yi xin jian 2; liu sheng 3; zhang hong hai 3; huang zhu lin 3; wang xue fang 3; wang zhi yong 3 (1. state key laboratory of laser technology; huazhong university of science and technology; wuhan430074; china; 2. dept. of optoelectronic engineering; huazhong university of science and technology; wuhan430074; china; 3. research institute of microsystem; huazhong university of science and technology; wuhan430074; china)
..............page:249-250
Nanoindentation and nanoscratch measurements on the mechanical properties of SiO_2 film
zhang hai xia 1; zhang tai hua 2; huan yong 2 (1.institute of microelectronics; peking university; beijing100871; china; 2. state key lab of nonlinear mechanics; institute of mechanics; chinese academy of sciences; beijing100080; china)
zhang hai xia 1; zhang tai hua 2; huan yong 2 (1.institute of microelectronics; peking university; beijing100871; china; 2. state key lab of nonlinear mechanics; institute of mechanics; chinese academy of sciences; beijing100080; china)
..............page:245-248
A MEMS testing system using computer microvision
feng ya lin 1; li da chao 2; jin cui yun 2; hao yi long 1; jin shi jiu 2 (1. institute of microelectronics; peking university; beijing100871; china; 2. state key laboratory of precision measuring technology and instruments; tianjin university; tianjin300072; china)
feng ya lin 1; li da chao 2; jin cui yun 2; hao yi long 1; jin shi jiu 2 (1. institute of microelectronics; peking university; beijing100871; china; 2. state key laboratory of precision measuring technology and instruments; tianjin university; tianjin300072; china)
..............page:221-223,234
Investigation of AFM-based nano-indentation on micro-machined silicon surface
zhao qing liang; liang ying chun; cheng kai; dong shen (precision engineering research institute; harbin institute of technology; harbin150001; china)
zhao qing liang; liang ying chun; cheng kai; dong shen (precision engineering research institute; harbin institute of technology; harbin150001; china)
..............page:241-244
Study on packaging technology in MEMS
shi yun bo 1; liu jun 2; zhang wen dong 1 (1. the education ministry key lab for instrumentation science & dynamic measurement; department of electronic engineering; north china institute of technology; shanxi030051; china; 2. institute of microelectronics; peking university; beijing100087; china)
shi yun bo 1; liu jun 2; zhang wen dong 1 (1. the education ministry key lab for instrumentation science & dynamic measurement; department of electronic engineering; north china institute of technology; shanxi030051; china; 2. institute of microelectronics; peking university; beijing100087; china)
..............page:235-237
Influence factors and enhancement on property of micro-silicon gyroscopes
wu xue zhong; liu zong lin; li sheng yi (mems research center of national university of defense science and technology; changsha 410073; china)
wu xue zhong; liu zong lin; li sheng yi (mems research center of national university of defense science and technology; changsha 410073; china)
..............page:274-276,280
Test structure for determination of thermal conductivity of surface micromachined polysilicon thin films
xu gao bin; huang qing an (key lab of mems of education ministry; southeast university; nanjing210096; china)
xu gao bin; huang qing an (key lab of mems of education ministry; southeast university; nanjing210096; china)
..............page:224-227
A new structure for measuring MEMS films fracture strength——thermal actuator
mei nian song; huang qing an (key laboratory of mems of education ministry; southeast university; nanjing210096; china)
mei nian song; huang qing an (key laboratory of mems of education ministry; southeast university; nanjing210096; china)
..............page:215-217
Application of microscopic interferometry in dynamic testing system of MEMS
guo tong; hu xiao dong; li da chao; hu chun guang; hu xiao tang (state key laboratory of precision measuring technology and instruments; tianjin university; tianjin300072; china)
guo tong; hu xiao dong; li da chao; hu chun guang; hu xiao tang (state key laboratory of precision measuring technology and instruments; tianjin university; tianjin300072; china)
..............page:218-220
..............page:212-214
Analysis of error induced by residual charges in mechanical parameters
jiang yan feng 1; huang qing an 2 (1. microelectronic center; college of information engineering; north china university of technology; beijing100041; china; 2. mems key lab of education ministry; department of electrical engineering; southeast university; nanjing210096; china)
jiang yan feng 1; huang qing an 2 (1. microelectronic center; college of information engineering; north china university of technology; beijing100041; china; 2. mems key lab of education ministry; department of electrical engineering; southeast university; nanjing210096; china)
..............page:204-206,211
Design and fabrication of humidity sensor for MEMS hermetic package test
xiong tao 1; yi xin jian 2; chen si hai 3; chen ming xiang 3; zhou shao bo 3 (1. department of opto electronics engineering; 2.naional key lab of laser technology; 3.institute of microsystem; huazhong university of sciencet & technology; wuhan430074; china)
xiong tao 1; yi xin jian 2; chen si hai 3; chen ming xiang 3; zhou shao bo 3 (1. department of opto electronics engineering; 2.naional key lab of laser technology; 3.institute of microsystem; huazhong university of sciencet & technology; wuhan430074; china)
..............page:251-253
Investigation on Au-Si wafer bonding for MEMS device packaging
liu xue song; yan gui zhen; hao yi long; zhang hai xia (institute of microelectronics; peking university; beijing100871; china)
liu xue song; yan gui zhen; hao yi long; zhang hai xia (institute of microelectronics; peking university; beijing100871; china)
..............page:238-240,248
Study on sputtering process of tin oxide
feng hai yu 1; huang yuan qing 1; feng yong jian 2 (1. department of mechanical & electronic engineering; xiamen university; xiamen 361005; china; 2. pen tung sah mems research center of xiamen university; xiamen 361005; china)
feng hai yu 1; huang yuan qing 1; feng yong jian 2 (1. department of mechanical & electronic engineering; xiamen university; xiamen 361005; china; 2. pen tung sah mems research center of xiamen university; xiamen 361005; china)
..............page:189-191
Solution of the stiffness of 2-D capacitive silicon microaccelerometer
liu yu 1; 2 ; wen zhi yu 1; zhang liu qiang 1; liang yu qian 1; wen zhong quan 1; li xia 1 (1. college of opto electronic engineering ; chongqing university; chongqing 400044; china; 2. college of automoble engineering; chongqing institute of technology; chongqing 400044; china)
liu yu 1; 2 ; wen zhi yu 1; zhang liu qiang 1; liang yu qian 1; wen zhong quan 1; li xia 1 (1. college of opto electronic engineering ; chongqing university; chongqing 400044; china; 2. college of automoble engineering; chongqing institute of technology; chongqing 400044; china)
..............page:289-291
A micromachined piezoresistive accelerometer and its design optimization
huang shu sen; guo nan xiang; huang hui; song zhao hui; li xin xin; wang yue lin (state key laboratory of transducer technology; institute of microsystem and information technology; chinese academy of sciences; shanghai 200050; china)
huang shu sen; guo nan xiang; huang hui; song zhao hui; li xin xin; wang yue lin (state key laboratory of transducer technology; institute of microsystem and information technology; chinese academy of sciences; shanghai 200050; china)
..............page:305-308
Flip chip bonding technology used in modern micro-photoelectron package
pei wei hua; deng hui; chen hong da (state key lab on integrated optoelectronics; institute of semiconductors; the chinese academy of sciences; beijing100083; china)
pei wei hua; deng hui; chen hong da (state key lab on integrated optoelectronics; institute of semiconductors; the chinese academy of sciences; beijing100083; china)
..............page:231-234
Direct measurement of force in biology with AFM
wang yan xia 1; 2 ; li yan ning 1; fu xing 1; li zheng guang 3; hu xiao tang 1 (1. the state key lab. of precision measuring & technology and instruments; tianjin university; tianjin300072; china; 2. information control & engineering college; qingdao university of sci tech; qingdao266042; china; 3. qingdao heat & power company; qingdao266034; china)
wang yan xia 1; 2 ; li yan ning 1; fu xing 1; li zheng guang 3; hu xiao tang 1 (1. the state key lab. of precision measuring & technology and instruments; tianjin university; tianjin300072; china; 2. information control & engineering college; qingdao university of sci tech; qingdao266042; china; 3. qingdao heat & power company; qingdao266034; china)
..............page:228-230
A novel piezoresistive accelerometer with high accuracy and overload ability
zeng zhao jun; shi jin jie (institute of microelectronics; peking university; beijing 100871; china)
zeng zhao jun; shi jin jie (institute of microelectronics; peking university; beijing 100871; china)
..............page:281-283,288
Research on laser assisted bonding and packaging system for plastic biochips
chen xi qu; lai jian jun; liu sheng; yi xin jian (institute of microsystem; huazhong university of science and technology; wuhan430074; china)
chen xi qu; lai jian jun; liu sheng; yi xin jian (institute of microsystem; huazhong university of science and technology; wuhan430074; china)
..............page:254-256
Measurement technique of in-plane motion for micro-structure based on blur image synthesis
jin cui yun 1; li da chao 1; feng ya lin 2; jin shi jiu 1; zeng zhou mo 1; hao yi long 2; zhang da cheng 2 (1.state key laboratory of precision measuring technology and instruments; tianjin university; tianjin300072; china; 2.institute of microelectronics; peking university; beijing100871; china)
jin cui yun 1; li da chao 1; feng ya lin 2; jin shi jiu 1; zeng zhou mo 1; hao yi long 2; zhang da cheng 2 (1.state key laboratory of precision measuring technology and instruments; tianjin university; tianjin300072; china; 2.institute of microelectronics; peking university; beijing100871; china)
..............page:208-211
development of packaging technologies for microsystems
jin yu feng 1; 2 ; wang zhen feng 1; wei jun 1 (1. singapore institute of manufacturing technology; singapore638075; 2 institute of microelectronics; peking university; beijing100871china)
jin yu feng 1; 2 ; wang zhen feng 1; wei jun 1 (1. singapore institute of manufacturing technology; singapore638075; 2 institute of microelectronics; peking university; beijing100871china)
..............page:207
Enhanced humidity effect of carbon nanotubes by chemical modified
wang wan lu; wu zi hua; liao ke jun; liu gao bin; wan bu yong; wang yong tian (department of applied physics; chongqing university; chongqing 400044; china)
wang wan lu; wu zi hua; liao ke jun; liu gao bin; wan bu yong; wang yong tian (department of applied physics; chongqing university; chongqing 400044; china)
..............page:517-519
Research on intelligent robot
wang yu long; xiong ji jun; zhang wen dong (nano technology research center; north china institute of technology; taiyuan030051; china)
wang yu long; xiong ji jun; zhang wen dong (nano technology research center; north china institute of technology; taiyuan030051; china)
..............page:567-569
Six-axis force/torque sensor for micro-testing system for MEMS
he de jian; zhang hong hai; liu sheng; wang xue fang; wang zhi yong (institute of microsystems; huazhong university of science and technology; wuhan 430074; china)
he de jian; zhang hong hai; liu sheng; wang xue fang; wang zhi yong (institute of microsystems; huazhong university of science and technology; wuhan 430074; china)
..............page:503-505,511
Characterization of the pressure wave in piezoelectrically actuated micro jet
feng yan ying; zhou zhao ying; ye xiong ying; wang guo hui (mems lab; center for mico/nano technology; tsinghua university; beijing; 100084; china)
feng yan ying; zhou zhao ying; ye xiong ying; wang guo hui (mems lab; center for mico/nano technology; tsinghua university; beijing; 100084; china)
..............page:506-511
Nano-material and Microelectrode Biosensors
wang li; cai xin xia; li hua qing; guo zeng jun; rao neng gao (institute of electronics; state key lab of transducer technology; chinese academy of sciences; beijing 100080; china)
wang li; cai xin xia; li hua qing; guo zeng jun; rao neng gao (institute of electronics; state key lab of transducer technology; chinese academy of sciences; beijing 100080; china)
..............page:526-528
The conductivity of single walled nanotube films in terahertz region
han jia guang; zhu zhi yuan; wang zhen xia; yu li ping; zhang wei; sun li tao; wang ting tai (shanghai institute of nuclear research; chinese academy of sciences; shanghai 201800; china)
han jia guang; zhu zhi yuan; wang zhen xia; yu li ping; zhang wei; sun li tao; wang ting tai (shanghai institute of nuclear research; chinese academy of sciences; shanghai 201800; china)
..............page:540-542
Large-scale preparation of aligned carbon nanotubes arrays
li dan; bai xiao dong; xu hua ming; liang ji (department of mechanical engineering; tsinghua university; beijing 100084; china)
li dan; bai xiao dong; xu hua ming; liang ji (department of mechanical engineering; tsinghua university; beijing 100084; china)
..............page:543-545
Study on making nano-patterns by atom standing wave lens
chen yuan pei; chen xu nan; li zhan; chen xian zhong (state key lab of optical technologies for microfabrication; institute of optics and electronics; chinese academy of sciences; chengdu 610209; china)
chen yuan pei; chen xu nan; li zhan; chen xian zhong (state key lab of optical technologies for microfabrication; institute of optics and electronics; chinese academy of sciences; chengdu 610209; china)
..............page:546-549,556
na mi ji shu shi chang guang kuo de gao ji shu qian yan
zhong xian xin
zhong xian xin
..............page:512-513,519
Stress-induced resistance changes in carbon nanotubes
wang wan lu; wang yong tian; liao ke jun; liu gao bin; li yong; ma yong (department of applied physics; chongqing university; chongqing 400044; china)
wang wan lu; wang yong tian; liao ke jun; liu gao bin; li yong; ma yong (department of applied physics; chongqing university; chongqing 400044; china)
..............page:514-516
Self-assembly and nanotechnology
zheng ming bo; cao jie ming; tang lu; chang xin; deng shao gao; ma xian jia; huan da jun; tao jie; xu guo yue (institute of nano material; college of material science & technology; nanjing university of aeronautics and astronautics; nanjing 210016; china)
zheng ming bo; cao jie ming; tang lu; chang xin; deng shao gao; ma xian jia; huan da jun; tao jie; xu guo yue (institute of nano material; college of material science & technology; nanjing university of aeronautics and astronautics; nanjing 210016; china)
..............page:531-535
The growth of ZnO nano-film by RF magnetic sputtering
li jing 1; wu sun tao 1; zhong can 1; 2 (1.pen tung sah mems research center; xiamen university; xiamen 361005; china; 2. department of physics; xiamen university; xiamen 361005; china)
li jing 1; wu sun tao 1; zhong can 1; 2 (1.pen tung sah mems research center; xiamen university; xiamen 361005; china; 2. department of physics; xiamen university; xiamen 361005; china)
..............page:550-551
Design techniques for MEMS safety locks
gao yang 1; 2 ; wen gui yin 2; zhao xiao lin 1; chen wen yuan 1; zhang chen 1 (1. micro/nano science and technology research institute; shanghai jiaotong university; shanghai200030; china; 2. institute of electronic engineering; china academy of engineering physics; mianyang621900; china)
gao yang 1; 2 ; wen gui yin 2; zhao xiao lin 1; chen wen yuan 1; zhang chen 1 (1. micro/nano science and technology research institute; shanghai jiaotong university; shanghai200030; china; 2. institute of electronic engineering; china academy of engineering physics; mianyang621900; china)
..............page:573-576
The influence of MEMS techniques on the fire control system
duan xiu sheng; cheng yuan zeng; sun shu ying (dept of optoelectronic engineering; ordnance engineering college; shijiazhuang; 050003; china)
duan xiu sheng; cheng yuan zeng; sun shu ying (dept of optoelectronic engineering; ordnance engineering college; shijiazhuang; 050003; china)
..............page:577-578,582
System analysis and design of a MEMS tunneling accelerometer
dong hai feng; jia yu bin; hao yi long (institute of microelectronics; peking university; beijing 100871; china)
dong hai feng; jia yu bin; hao yi long (institute of microelectronics; peking university; beijing 100871; china)
..............page:295-297
Novel torsion-mirror optical actuators
wu wen gang 1; li da chao 2; yuan yong 1; sun wei 1; yan gui zhen 1; hao yi long 1; jin shi jiu 2 (1.institute of microelectronics; peking university; beijing 100871; china; 2.state key laboratory of precision measuring technology and instruments; tianjin university; tianjin 300072; china)
wu wen gang 1; li da chao 2; yuan yong 1; sun wei 1; yan gui zhen 1; hao yi long 1; jin shi jiu 2 (1.institute of microelectronics; peking university; beijing 100871; china; 2.state key laboratory of precision measuring technology and instruments; tianjin university; tianjin 300072; china)
..............page:410-414
Theoretical study on resonant tunneling magnetometer
tang xue hua; you zheng; yang jian zhong (precision instrument department; tsinghua university; beijing 100084; china)
tang xue hua; you zheng; yang jian zhong (precision instrument department; tsinghua university; beijing 100084; china)
..............page:407-409
A novel composite membrane bridge structure for RF MEMS phase shifter and switched tunable capacitor
miao min; xiao zhi yong; wu guo ying; jin yu feng; hao yi long (mems group; institute of microelectronics; peking university; beijing 100871; china)
miao min; xiao zhi yong; wu guo ying; jin yu feng; hao yi long (mems group; institute of microelectronics; peking university; beijing 100871; china)
..............page:371-374
Design of Mach-Zehnder interferometer for Si-based ARROW pressure sensor
xiao su yan; wang dong hong; liu xiao wei; qin jian yong (center of mems of harbin institute of technology; harbin 150001; china)
xiao su yan; wang dong hong; liu xiao wei; qin jian yong (center of mems of harbin institute of technology; harbin 150001; china)
..............page:429-431,437
Electroplated CoNiMnP magnet array for MEMS actuator
zhang bo jun; zhao zhan; chen shao feng (state key laboratory of transducer technology; institute of electronics; chinese academy of sciences; beijing 100080; china)
zhang bo jun; zhao zhan; chen shao feng (state key laboratory of transducer technology; institute of electronics; chinese academy of sciences; beijing 100080; china)
..............page:385-387
Research of actuation characteristic of a curved cantilever electrostatic actuator
liu su yan; niu kai; ye xiong ying; zhou zhao ying (micro nano center; dept. of precision instruments; tsinghua university; beijing 100084; china)
liu su yan; niu kai; ye xiong ying; zhou zhao ying (micro nano center; dept. of precision instruments; tsinghua university; beijing 100084; china)
..............page:375-377
Study and fabrication of microstructure array chip based on light addressable potentiometric sensors
han jing hong; zhang hong; gu li bo; xu lei; chen shao feng; wang li; wang lei (state key laboratory of transducer technology; institute of electronics; chinese academy of sciences; beijing 100080; china)
han jing hong; zhang hong; gu li bo; xu lei; chen shao feng; wang li; wang lei (state key laboratory of transducer technology; institute of electronics; chinese academy of sciences; beijing 100080; china)
..............page:391-394
Study on judging the initial contact point in nanoindentation
yang shu ming 1; zhu qiang 1; zhao ze xiang 2; jiang zhuang de 1 (1. state key lab for manufacturing systems; institute of precision engineering; xi an jiaotong university; xi an710049; china; 2. zhongyuan institute of technology; zhengzhou450007; china)
yang shu ming 1; zhu qiang 1; zhao ze xiang 2; jiang zhuang de 1 (1. state key lab for manufacturing systems; institute of precision engineering; xi an jiaotong university; xi an710049; china; 2. zhongyuan institute of technology; zhengzhou450007; china)
..............page:200-203
An uncooled infrared imaging system based on bi-material cantilever pixels
wang wei bing 1; ye tian chun 1; chen da peng 1; wu xiao ping 2; zhang qing chuan 2; pan liang 2; duan zhi hui 2 (1. microelectronics r&d center; chinese academy of sciences; beijing 100029; china; 2. university of science and technology of china; hefei 230027; china)
wang wei bing 1; ye tian chun 1; chen da peng 1; wu xiao ping 2; zhang qing chuan 2; pan liang 2; duan zhi hui 2 (1. microelectronics r&d center; chinese academy of sciences; beijing 100029; china; 2. university of science and technology of china; hefei 230027; china)
..............page:404-406,418
Micro-and nano-fabrication by EC-SPM
tang jing; mao bing wei; tian zhong qun (state key laboratory for physical chemistry of solid surfaces; department of chemistry; xiamen university; xiamen 361005; china)
tang jing; mao bing wei; tian zhong qun (state key laboratory for physical chemistry of solid surfaces; department of chemistry; xiamen university; xiamen 361005; china)
..............page:192-196
Analysis of model and fabrication of AlGaN based PIN ultraviolet detectors
zhou jing; hao yi long; wu guo ying (mems research group of the department of microelectronics; peking university; beijing 100871; china)
zhou jing; hao yi long; wu guo ying (mems research group of the department of microelectronics; peking university; beijing 100871; china)
..............page:422-425
Electrochemical biosensors
cai xin xia; li hua qing; rao neng gao; wang li; cui da fu (state key lab of transducer technology (north base); institute of electronics; chinese academy of sciences; beijing 100080; china)
cai xin xia; li hua qing; rao neng gao; wang li; cui da fu (state key lab of transducer technology (north base); institute of electronics; chinese academy of sciences; beijing 100080; china)
..............page:359-361
Optical detection on micro biochemical chip
li feng; wu yi hui; ju hui; he min ying (state key lab of applied optics; changchun institute of optics fine mechanics and physics; changchun 130022; china)
li feng; wu yi hui; ju hui; he min ying (state key lab of applied optics; changchun institute of optics fine mechanics and physics; changchun 130022; china)
..............page:365-368
Design and simulation of a miniature electric field sensor based on MEMS technique
pei qiang; xia shan hong; gong chao; bai qiang; chen shao feng (state key lab of transducer technology; institute of electronics; chinese academy of sciences; beijing 100080; china)
pei qiang; xia shan hong; gong chao; bai qiang; chen shao feng (state key lab of transducer technology; institute of electronics; chinese academy of sciences; beijing 100080; china)
..............page:388-390
Integrated optical interferometer based on bonding technology
li yi gui 1; hui chun 1; mi xiao yu 2; hane kazuhiro 2 (1. institute of micro/nanometer science & technology; shanghai jiao tong university; shanghai; 200030; china; 2. department of mechatronics and precision engineering; tohoku university; 980 8579; japan)
li yi gui 1; hui chun 1; mi xiao yu 2; hane kazuhiro 2 (1. institute of micro/nanometer science & technology; shanghai jiao tong university; shanghai; 200030; china; 2. department of mechatronics and precision engineering; tohoku university; 980 8579; japan)
..............page:397-399
Design and optimization of MEMS optical switch actuated by piezoelectric cantilever based on Si
fang hua jun; liu jian she; ren tian ling; liu li tian (institute of microelectronics; tsinghua university; beijing 100084; china)
fang hua jun; liu jian she; ren tian ling; liu li tian (institute of microelectronics; tsinghua university; beijing 100084; china)
..............page:400-403
MEMS-based micro fuel cell and its air supplying method by piezoelectric fan
yang xing; zhou zhao ying; ye xiong ying; wang xiao hao (mems lab; department of precision instrument; tsinghua university; beijing 100084; china)
yang xing; zhou zhao ying; ye xiong ying; wang xiao hao (mems lab; department of precision instrument; tsinghua university; beijing 100084; china)
..............page:378-381
Two membrane microwave MEMS switches
zhu jian 1; 2 ; yu yuan wei 2; lu le 2; jia shi xing 2; zhang long 2 (1. dept. of instrument science & engineering; southeast university; nanjing 210096; china; 2. nanjing electronic devices institute; nanjing 210016; china)
zhu jian 1; 2 ; yu yuan wei 2; lu le 2; jia shi xing 2; zhang long 2 (1. dept. of instrument science & engineering; southeast university; nanjing 210096; china; 2. nanjing electronic devices institute; nanjing 210016; china)
..............page:382-384
optimizing resistance of round hollow wire at high frequency
feng yong jian 1; zhang tao 2 (1. micro electronic mechanical center; xiamen university; xiamen 361005; china; 2. department of electrical engineering computer science; case western reserve university; cleveland; oh 44106; usa)
feng yong jian 1; zhang tao 2 (1. micro electronic mechanical center; xiamen university; xiamen 361005; china; 2. department of electrical engineering computer science; case western reserve university; cleveland; oh 44106; usa)
..............page:415-418
RF MEMS membrane switches on GaAs substrates
zheng wei bin 1; huang qing an 1; li fu xiao 2; liao xiao ping 1 (1. key laboratory of mems of education ministry; nanjing 210096; china; 2. nanjing electronic devices institute; nanjing 210016; china)
zheng wei bin 1; huang qing an 1; li fu xiao 2; liao xiao ping 1 (1. key laboratory of mems of education ministry; nanjing 210096; china; 2. nanjing electronic devices institute; nanjing 210016; china)
..............page:395-396,403
Study of multifunction sensor with data readout
chen wei ping; tian li 1; tian lei 2; li ming jiang 1; sun li ning 1 (1. harbin institute of technology; harbin 150001; china; 2. the 49th research institute; cetc ; harbin 150001; china)
chen wei ping; tian li 1; tian lei 2; li ming jiang 1; sun li ning 1 (1. harbin institute of technology; harbin 150001; china; 2. the 49th research institute; cetc ; harbin 150001; china)
..............page:426-428
A novel electrostatically driven torisional micromirror
wang cong shun 1; xiong chun yang 1; yang zhen chuan 2; zhang da cheng 2; fang jing 1 (1. department of mechanics and engineering science; peking university; beijing 100871; china; 2. institute of microelectronics; peking university; beijing 100871; china)
wang cong shun 1; xiong chun yang 1; yang zhen chuan 2; zhang da cheng 2; fang jing 1 (1. department of mechanics and engineering science; peking university; beijing 100871; china; 2. institute of microelectronics; peking university; beijing 100871; china)
..............page:419-421
The controlling of nanoparticle agglomerates
feng la jun; liu yi hui; lei a li (college of materials science and engineering; xi an university of technology; xi an 710048; china)
feng la jun; liu yi hui; lei a li (college of materials science and engineering; xi an university of technology; xi an 710048; china)
..............page:536-539,542
BioMEMS——bridging of biomedical diagnostics and treatments
yu xiao mei; zhang da cheng (institute of microelectronics; peking university; beijing; 100871; china)
yu xiao mei; zhang da cheng (institute of microelectronics; peking university; beijing; 100871; china)
..............page:351-355
overview of worldwide mems industry and market
cui zheng (rutherford appleton laboratory; chilton; didcot; oxon ox11 0qx; uk)
cui zheng (rutherford appleton laboratory; chilton; didcot; oxon ox11 0qx; uk)
..............page:1-4
Theoretical study on lattice vibration energy and specific heat of staff in nano-machine and micro-machine
huang jian ping; li sheng yi; wu xue zhong; luo bing ( national university of defense science and technology; changsha 410073; china )
huang jian ping; li sheng yi; wu xue zhong; luo bing ( national university of defense science and technology; changsha 410073; china )
..............page:11-13,18
The research of biochip for electrophoresis
yi fu ting 1; jiang xiong ping 2; peng liang qiang 1; zhang ju fang 1; han yong 1 (1. synchrotron radiation lab; institute of high energy physics; cas; beijing 100039; china; 2. institute for drug control of pla; beijing 100071; china)
yi fu ting 1; jiang xiong ping 2; peng liang qiang 1; zhang ju fang 1; han yong 1 (1. synchrotron radiation lab; institute of high energy physics; cas; beijing 100039; china; 2. institute for drug control of pla; beijing 100071; china)
..............page:356-358,361
Design of capacitive accelerometer for environment vibration measurement
zhou zai fa; huang qing an; qin ming (key laboratory of mems of education ministry; southeast university; nanjing 210096; china)
zhou zai fa; huang qing an; qin ming (key laboratory of mems of education ministry; southeast university; nanjing 210096; china)
..............page:298-301
Development of the purification for metallothionein (MT)
wang xiang 1; zhang da cheng 1; li ting 1; wang wei 1; ren hong wei 2; han tie gang 2; yu mei min 2 (1. institute of microelectronics; peking university; beijing 100871; china; 2. school of life science; peking university; beijing 100871; china)
wang xiang 1; zhang da cheng 1; li ting 1; wang wei 1; ren hong wei 2; han tie gang 2; yu mei min 2 (1. institute of microelectronics; peking university; beijing 100871; china; 2. school of life science; peking university; beijing 100871; china)
..............page:335-337
Fabrication of UV-LIGA micro acceleration switch
chen guang yan; he xiao ping; shi zhi gui; ding yuan ping; zhao long (inst. of electronic engineering; china academy of engineering physics; mianyang 621900; china)
chen guang yan; he xiao ping; shi zhi gui; ding yuan ping; zhao long (inst. of electronic engineering; china academy of engineering physics; mianyang 621900; china)
..............page:312-313,316
Low voltage separation model and its control system for electrophoresis chip
li xia; wen zhi yu; li xing hai; wu ying; peng shu cheng (dept. of photoelectronics eng; chongqing university; chongqing 400044; china)
li xia; wen zhi yu; li xing hai; wu ying; peng shu cheng (dept. of photoelectronics eng; chongqing university; chongqing 400044; china)
..............page:344-346,350
Micro biochemical analysis system
wen zhi yu 1; chen gang 1; pan yin song 1; xu yi 2; li xia 1; jiang zi ping 1 (1.college of optoelectronic engineering; chongqing university; chongqing; 400044; china; 2. college of chemical engineering; chongqing university; chongqing; 400044; china)
wen zhi yu 1; chen gang 1; pan yin song 1; xu yi 2; li xia 1; jiang zi ping 1 (1.college of optoelectronic engineering; chongqing university; chongqing; 400044; china; 2. college of chemical engineering; chongqing university; chongqing; 400044; china)
..............page:338-339,343
Designing of capillary electrophoresis chips based on linear-arrayed electrode for μTAS
chen chao; zhao zhan; zhang bo jun (state key laboratory of transducer technology; institute of electronics; chinese academy of sciences; beijing 100080; china)
chen chao; zhao zhan; zhang bo jun (state key laboratory of transducer technology; institute of electronics; chinese academy of sciences; beijing 100080; china)
..............page:362-364,368
Computer numerical analysis of electrokinetic injection in chip capillary electrophoresis
zheng jiu wen; yan wei ping; liu chong; bai ji ling (1. department of electronics; dalian university of technology; dalian 116024; china; 2. research center for mems; dalian university of technology; dalian 116024; china; 3. state key laboratory of molecular reaction dynamics; dalian institute of chemical physics; chinese academy of sciences; dalian 116023; china)
zheng jiu wen; yan wei ping; liu chong; bai ji ling (1. department of electronics; dalian university of technology; dalian 116024; china; 2. research center for mems; dalian university of technology; dalian 116024; china; 3. state key laboratory of molecular reaction dynamics; dalian institute of chemical physics; chinese academy of sciences; dalian 116023; china)
..............page:328-331
A feasible framework for virtual operation of MEMS devices
tan yi yong; zhao xin; lu gui zhang (institute of robotics and information automatic system; nankai university; tianjin 300071; china)
tan yi yong; zhao xin; lu gui zhang (institute of robotics and information automatic system; nankai university; tianjin 300071; china)
..............page:31-35
Multi-port-element network based MEMS system level modeling methodology
ma bing he; hou peng fei; yuan wei zheng (mems/nems laboratory; northwestern polytechnical university; xi an 710072; china)
ma bing he; hou peng fei; yuan wei zheng (mems/nems laboratory; northwestern polytechnical university; xi an 710072; china)
..............page:40
An equivalent circuit macromodel for a multi-layer beam electromechanical coupled system
rong hua; huang qing an; li wei hua (key lab of mems of education ministry; southeast university; nanjing 210096; china)
rong hua; huang qing an; li wei hua (key lab of mems of education ministry; southeast university; nanjing 210096; china)
..............page:44-47
Modeling and simulation of nonlinear behavior of mechanical-electrostatic coupled MEMS devices
sun zheng xin; huang qing an; li wei hua (key laboratory of mems of education ministry; southeast university; nanjing; 210096; china)
sun zheng xin; huang qing an; li wei hua (key laboratory of mems of education ministry; southeast university; nanjing; 210096; china)
..............page:48-50
Research on the micro-heater and temperature sensor in PCR biochip
xi wen zhu 1; yan wei ping 1; du li qun 2; guo ji hong 2 (1. dept of electronic engineering; dalian university of technology; dalian 116023; china; 2. research center for microsystem technology; dalian university of technology; dalian 116023; china)
xi wen zhu 1; yan wei ping 1; du li qun 2; guo ji hong 2 (1. dept of electronic engineering; dalian university of technology; dalian 116023; china; 2. research center for microsystem technology; dalian university of technology; dalian 116023; china)
..............page:332-334,337
Effects on separating resolution and efficiency of electrophoresis chip
liu gang; wen zhi yu; li xia; zhang liu qiang; peng shu cheng (department of optic electronics engineering; chongqing university; chongqing 400044; china)
liu gang; wen zhi yu; li xia; zhang liu qiang; peng shu cheng (department of optic electronics engineering; chongqing university; chongqing 400044; china)
..............page:347-350
Fitting correction for an analytical model of pull-in voltage of fixed-fixed beams
nie meng 1; 2 ; huang qing an 2; wang jian hua 1; rong hua 2 (1. school of science; hefei university of technology; hefei 230009; china; 2 key laboratory of mems of education ministry; southeast university; nanjing 210096; china)
nie meng 1; 2 ; huang qing an 2; wang jian hua 1; rong hua 2 (1. school of science; hefei university of technology; hefei 230009; china; 2 key laboratory of mems of education ministry; southeast university; nanjing 210096; china)
..............page:68-70
Software development of the meteorological monitoring microsystem
hu de sheng; zhang zhong ping; huang qing an (key lab of mems of education ministry; southeast university; nanjing 210096; china)
hu de sheng; zhang zhong ping; huang qing an (key lab of mems of education ministry; southeast university; nanjing 210096; china)
..............page:71-73
Mechanical analyzing of V-shaped cantilever electrothermal actuator
zhang yong yu; shen xue jin; chen xiao yang (school of mechatronical engineering & automation; shanghai university; shanghai 200072; china)
zhang yong yu; shen xue jin; chen xiao yang (school of mechatronical engineering & automation; shanghai university; shanghai 200072; china)
..............page:80-83
Transient field analysis for series MEMS switch
gu hong ming 1; l miao 2; shan fu qi 1; gao bao xin 1; liang chun guang 2 (1. department of electronic engineering; tsinghua university; beijing 100084; china; 2. hebei semiconductor research institute; shijiazhuang 050051; china)
gu hong ming 1; l miao 2; shan fu qi 1; gao bao xin 1; liang chun guang 2 (1. department of electronic engineering; tsinghua university; beijing 100084; china; 2. hebei semiconductor research institute; shijiazhuang 050051; china)
..............page:84-86
The research and development of MEMS CAD tool IMEE
zhang hai xia; guo hui; xiao zhi yong; zhou rong chun; hao yi long (institute of microelectronics; peking university; beijing 100871; china)
zhang hai xia; guo hui; xiao zhi yong; zhou rong chun; hao yi long (institute of microelectronics; peking university; beijing 100871; china)
..............page:92-95
Finite element analysis on vacuum microelectronic acceleration sensor
peng shu cheng; wen zhi yu; wen zhong quan; pan yin song; li xia (microsystem lab; dept of optoelectronics eng; chongqing university; chongqing 400044; china)
peng shu cheng; wen zhi yu; wen zhong quan; pan yin song; li xia (microsystem lab; dept of optoelectronics eng; chongqing university; chongqing 400044; china)
..............page:292-294,301
Formation of selective thick porous silicon layers for insulating Si substrate
chen zhong min; liu ze wen; liu li tian; li zhi jian (institute of microelectronics; tsinghua university; beijing 100084; china)
chen zhong min; liu ze wen; liu li tian; li zhi jian (institute of microelectronics; tsinghua university; beijing 100084; china)
..............page:101-103
Partlibrarybased method of MEMS design
lu gui zhang; zhao xin (institute of robotics and information automatic system; nankai university; tianjin 300071; china)
lu gui zhang; zhao xin (institute of robotics and information automatic system; nankai university; tianjin 300071; china)
..............page:36-39,43
The integrated design and visualization of MEMS process
tang hua feng; yuan wei zheng (mems/nems laboratory; northwestern polytechnical university; xi an 710072; china)
tang hua feng; yuan wei zheng (mems/nems laboratory; northwestern polytechnical university; xi an 710072; china)
..............page:51-53
Research into micro chemical thrusters
chen xu peng; li yong; zhou zhao ying (department of precision instruments and mechanology; tsinghua university; beijing 100084; china)
chen xu peng; li yong; zhou zhao ying (department of precision instruments and mechanology; tsinghua university; beijing 100084; china)
..............page:456-460
Preparation of highly oriented PZT film by 0-3 composite method
chen chao; chu jia ru; lu jian; yang yan (department of precision machinery and precision instrumentation; ustc; hefei 230027; china)
chen chao; chu jia ru; lu jian; yang yan (department of precision machinery and precision instrumentation; ustc; hefei 230027; china)
..............page:499-502
Precise control of poly(N-isopropylacrylamide) nanogel by photopolymerization
qiao xiang li; hou zheng chi; sheng kang long; yao si de (shanghai institute of nuclear research; chinese academy of sciences; shanghai 201800; china)
qiao xiang li; hou zheng chi; sheng kang long; yao si de (shanghai institute of nuclear research; chinese academy of sciences; shanghai 201800; china)
..............page:523-525
Simulations and optimization for micro gas flowmeter
wang mo ran; chen ze jing; li zhi xin (key lab of education ministry of heat transfer enhancement and energy conservation; department of engineering mechanics; tsinghua university; beijing 100084; china)
wang mo ran; chen ze jing; li zhi xin (key lab of education ministry of heat transfer enhancement and energy conservation; department of engineering mechanics; tsinghua university; beijing 100084; china)
..............page:65-67,73
Structure of La-, Ca-PbTiO_3 nanocrystals and phonon characteristics
deng yu; zhang ming sheng (national laboratory of solid state microstructures; department of physics; nanjing university; nanjing 210093; china)
deng yu; zhang ming sheng (national laboratory of solid state microstructures; department of physics; nanjing university; nanjing 210093; china)
..............page:529-530,535
Microfabrication of micron metallic powder with laser sintering
chen ji min; zuo tie chuan (national center of laser technology; beijing university of technology; beijing 100022; china)
chen ji min; zuo tie chuan (national center of laser technology; beijing university of technology; beijing 100022; china)
..............page:170-172
Research and application of thick photoresist lithography using UV light
li wen; tan zhi min; xue xin; liu li tian (institute of microelectronics; tsinghua university; beijing 100084; china)
li wen; tan zhi min; xue xin; liu li tian (institute of microelectronics; tsinghua university; beijing 100084; china)
..............page:151-153
A new micromechanical anchor structure
liu zu tao; huang qing an (key laboratory of mems of education ministry; southeast university; nanjing 210096; china)
liu zu tao; huang qing an (key laboratory of mems of education ministry; southeast university; nanjing 210096; china)
..............page:74-75,83
Design and fabrication of signal processing integrated circuit for accelerometer
lan mu jie; liu xiao wei; chen wei ping; liu ya chun; wang mei; wang dong wang (mems center; harbin institute of technology; harbin; 150001; china)
lan mu jie; liu xiao wei; chen wei ping; liu ya chun; wang mei; wang dong wang (mems center; harbin institute of technology; harbin; 150001; china)
..............page:564-566,576
Application of fuzzy neural network in target recognition
zhang yan jun; liu jun; zhang wen dong (nano technology research center; north china institute of technology; taiyuan 030051; china)
zhang yan jun; liu jun; zhang wen dong (nano technology research center; north china institute of technology; taiyuan 030051; china)
..............page:96-97
E-beam nano-lithography technology research
liu yu gui; wang wei jun; luo si wei (the 13th research institute; cetc; shijiazhuang 050051; china)
liu yu gui; wang wei jun; luo si wei (the 13th research institute; cetc; shijiazhuang 050051; china)
..............page:562-563
Pipe inspection mobile microrobot system based on electromagnetic micromotor with 4mm diameter
chen jia pin; li zhen bo; zhang chen (research institute of micro/nanometer science technology; shanghai jiaotong university; shanghai200030; china)
chen jia pin; li zhen bo; zhang chen (research institute of micro/nanometer science technology; shanghai jiaotong university; shanghai200030; china)
..............page:570-572
Effects of annealing on gas sensing performance and microstructure of nano-grain ZnO films
ma yong 1; 2 ; wang wan lu 1; liao ke jun 1; ge fang fang 1 (1. college of science; chongqing university; chongqing 400044; china; 2. dept of physics; chongqing normal university; chongqing 400047; china)
ma yong 1; 2 ; wang wan lu 1; liao ke jun 1; ge fang fang 1 (1. college of science; chongqing university; chongqing 400044; china; 2. dept of physics; chongqing normal university; chongqing 400047; china)
..............page:108-109,112
Neural networks method for parameter determination of yttrium oxide ultrafine making
huang qian; zheng qi lun (college of electronics &communication; south china university of science & technology; guangzhou 510641; china)
huang qian; zheng qi lun (college of electronics &communication; south china university of science & technology; guangzhou 510641; china)
..............page:98-100
Fabrication technique of deep electrical isolation trenches using DRIE and medium refill
zhu yong; yan gui zhen; wang cheng wei; wang yang yuan (institute of microelectronics; peking university; beijing 100871; china)
zhu yong; yan gui zhen; wang cheng wei; wang yang yuan (institute of microelectronics; peking university; beijing 100871; china)
..............page:113-115
The status and tendency of next generation lithography
li yan qiu (micro & nano fabrication devision; institute of electrical engineering; chinese academy of sciences; beijing 100080; china)
li yan qiu (micro & nano fabrication devision; institute of electrical engineering; chinese academy of sciences; beijing 100080; china)
..............page:116-119,125
Design of integrated sensor for atmosphere research
wu yu; fang zhen; zhao zhan; chen chao; zhang bo jun (state key laboratory of transducer technology; chinese academy of sciences; beijing100080; china)
wu yu; fang zhen; zhao zhan; chen chao; zhang bo jun (state key laboratory of transducer technology; chinese academy of sciences; beijing100080; china)
..............page:583-585,589
Research for sandwich MEMS device by vacuum bonding
yang guo yu 1; sui guo hua 1; zhang zheng yuan 1; 2 ; wen zhi yu 2 (1.the 24th research institute; cetc; chongqing 400060; china; 2. department optoelectronic engineering; chongqing university; chongqing 400060; china)
yang guo yu 1; sui guo hua 1; zhang zheng yuan 1; 2 ; wen zhi yu 2 (1.the 24th research institute; cetc; chongqing 400060; china; 2. department optoelectronic engineering; chongqing university; chongqing 400060; china)
..............page:120-121
Research of critical dimension loss control in the ICP etch of deep Silicon trenches
wang cheng wei; yan gui zhen; zhu yong (institute of microelectronics; peking university; beijing 100871; china)
wang cheng wei; yan gui zhen; zhu yong (institute of microelectronics; peking university; beijing 100871; china)
..............page:104-107
Simulation and analysis of basic RTD-based circuits
cheng yue; xu jun (institute of microelectronics; tsinghua university; beijing 100084; china)
cheng yue; xu jun (institute of microelectronics; tsinghua university; beijing 100084; china)
..............page:579-582
Driver applied in micro or small electromechanical stronglink
zhang wei ping 1; chen wen yuan 1; zhao xiao lin 1; gao yang 1; 2 ; wu xiao sheng 1 (1. information storage research center; research institute of micro/nano science and technology; shanghai200030; china; 2. electronic engineering institute; china academy of engineering physics; mianyang621900; china)
zhang wei ping 1; chen wen yuan 1; zhao xiao lin 1; gao yang 1; 2 ; wu xiao sheng 1 (1. information storage research center; research institute of micro/nano science and technology; shanghai200030; china; 2. electronic engineering institute; china academy of engineering physics; mianyang621900; china)
..............page:586-589
Bonding for poly(dimethylsiloxane) microfluidic chip by oxygen plasma treatment under medium vacuum
shen de xin 1; zhang chun quan 2; luo zhong zi 2; zhou yong liang 1 ; zhang feng 1; li jia 1; tian zhao wu 1 (1. state key lab for phys chem of the solid surface; department of chemistry; xiamen university; xiamen 361005; china; 2. pen tung sah mems research center of xiamen university; xiamen 361005; china)
shen de xin 1; zhang chun quan 2; luo zhong zi 2; zhou yong liang 1 ; zhang feng 1; li jia 1; tian zhao wu 1 (1. state key lab for phys chem of the solid surface; department of chemistry; xiamen university; xiamen 361005; china; 2. pen tung sah mems research center of xiamen university; xiamen 361005; china)
..............page:369-370
Study on data acquisition of vacuum micro electronic pressure sensor array
pan yin song; wen zhi yu; liang yu qian; jiang zi ping (lab of optoelectronic technology and system; chongqing university; chongqing 400044; china)
pan yin song; wen zhi yu; liang yu qian; jiang zi ping (lab of optoelectronic technology and system; chongqing university; chongqing 400044; china)
..............page:435-437
Study on an integrated five-dimension micro force/torque sensor
sun li ning; tang xue yan; rong wei bin (robotics research institute; harbin institute of technology; harbin; 150001; china)
sun li ning; tang xue yan; rong wei bin (robotics research institute; harbin institute of technology; harbin; 150001; china)
..............page:467-469
Temperature properties and compensation for silicon piezoresistive sensors
fan shang chun; peng chun rong (school of automation science and electrical engineering; beihang university; beijing 100083; china)
fan shang chun; peng chun rong (school of automation science and electrical engineering; beihang university; beijing 100083; china)
..............page:484-488
A resonant beam pressure sensor with a peninsular structure
chen de yong; cui da fu; gao xiao tong; fan zhao yan; wang li (state key laboratory of transducer technology; institute of electronics; chinese academy of sciences; beijing 100080; china)
chen de yong; cui da fu; gao xiao tong; fan zhao yan; wang li (state key laboratory of transducer technology; institute of electronics; chinese academy of sciences; beijing 100080; china)
..............page:464-466
Research on a piezoresistive mass flow sensor
wang xiao bao 1; qian jin 2; zhang da cheng 1 (1. institute of microelectronics; peking university; beijing 100871; china; 2.institute of mechanics; chinese academy of sciences; beijing 100871; china)
wang xiao bao 1; qian jin 2; zhang da cheng 1 (1. institute of microelectronics; peking university; beijing 100871; china; 2.institute of mechanics; chinese academy of sciences; beijing 100871; china)
..............page:449-451
Simulation of integrated wind flow sensor system on a chip
zhu hao; qin ming; huang qing an (key lab of educational ministry; southeast university; nanjing 210096; china)
zhu hao; qin ming; huang qing an (key lab of educational ministry; southeast university; nanjing 210096; china)
..............page:54-56
Analysis of electrochemical behaviors on the carbon nanotube electrode
hu chen guo; wang wan lu; ma yong; wu zi hua; hu jiang chuan (department of applied physics; chongqing university; chongqing 400030; china)
hu chen guo; wang wan lu; ma yong; wu zi hua; hu jiang chuan (department of applied physics; chongqing university; chongqing 400030; china)
..............page:520-522,525
Single poly EEPROM
ren tao; liu zhi hong; zhu jun (institute of microelectronics; tsinghua university; beijing 100084; china)
ren tao; liu zhi hong; zhu jun (institute of microelectronics; tsinghua university; beijing 100084; china)
..............page:552-556
Nanoelectronic devices
guo rong hui 1; 3 ; zhao zheng ping 1; 2 ; liu yu gui 3; wu yi bin 3; l miao 3; yang yong jun 3 (1. xi dian university; xi an 710071; china; 2. china electronics technology group corporation; beijing 100000; china; 3. hebei semiconductor research institute; shijiazhuang 050051; china)
guo rong hui 1; 3 ; zhao zheng ping 1; 2 ; liu yu gui 3; wu yi bin 3; l miao 3; yang yong jun 3 (1. xi dian university; xi an 710071; china; 2. china electronics technology group corporation; beijing 100000; china; 3. hebei semiconductor research institute; shijiazhuang 050051; china)
..............page:557-561
Effect of buffer layer on resonant states in material GaAs/Ga_(1-x)Al_xAs
yang xiao feng (department of physics; north china institute of technology; taiyuan 030051; china)
yang xiao feng (department of physics; north china institute of technology; taiyuan 030051; china)
..............page:8-10
Analysis on the mechanical preference of microresonators with meander suspensions
zhao jiang ming 1; shen xue jin 1; zhang hai xia 2; chen xiao yang 1 (1. school of electromechanical engineering & automation; shanghai university; shanghai 200072; china; 2. institute of microelectronics; peking university; beijing 100871; china)
zhao jiang ming 1; shen xue jin 1; zhang hai xia 2; chen xiao yang 1 (1. school of electromechanical engineering & automation; shanghai university; shanghai 200072; china; 2. institute of microelectronics; peking university; beijing 100871; china)
..............page:22-26
Meso-piezoresistance effect
wen ting dun; zhang wen dong (the center of micro and nano technology; north china institute of technology; taiyuan 030051; china)
wen ting dun; zhang wen dong (the center of micro and nano technology; north china institute of technology; taiyuan 030051; china)
..............page:41-43
Study on modeling of virtual assembly in MEMS design
zhou yi yun; zhao xin; lu gui zhang (institute of robotics and information automatic system; nankai university; tianjin 300071; china)
zhou yi yun; zhao xin; lu gui zhang (institute of robotics and information automatic system; nankai university; tianjin 300071; china)
..............page:27-30
Simulation and analysis for gas flow and heat transfer in micro nozzle
wang mo ran; chen ze jing; li zhi xin (key lab of education ministry of heat transfer enhancement and energy conservation; department of engineering mechanics; tsinghua university; beijing 100084; china)
wang mo ran; chen ze jing; li zhi xin (key lab of education ministry of heat transfer enhancement and energy conservation; department of engineering mechanics; tsinghua university; beijing 100084; china)
..............page:61-64
Creation and verification of the controlled source macromodel of equivalent circuit for cantilever beam
wen fei na; li wei hua; rong hua (key laboratory of mems of education ministry; microelectronics center; southeast university; nanjing 210096; china )
wen fei na; li wei hua; rong hua (key laboratory of mems of education ministry; microelectronics center; southeast university; nanjing 210096; china )
..............page:76-79
Simulation,fabrication and characterization of planar microsprings
chen di; shi lei; zhu jun; li jian hua; ni zhi ping; liu jing quan; li yi gui (key laboratory for thin films and microtechnology of education ministry; research institute of micro/nanometer science and technology; shanghai jiao tong university; shanghai 200030; china)
chen di; shi lei; zhu jun; li jian hua; ni zhi ping; liu jing quan; li yi gui (key laboratory for thin films and microtechnology of education ministry; research institute of micro/nanometer science and technology; shanghai jiao tong university; shanghai 200030; china)
..............page:57-60
Design and fabrication of microcalorimeter for measuring heat capacity of thin films
song qing lin 1; cui zheng 2; xia shan hong 1; chen shao feng 1 (1. state key lab.of transduer technology; institute of electronics; chinese academy of sciences; beijing 100080; china; 2. rutherford appleton laboratory; chilton; didcot; oxon ox11 0qx; uk)
song qing lin 1; cui zheng 2; xia shan hong 1; chen shao feng 1 (1. state key lab.of transduer technology; institute of electronics; chinese academy of sciences; beijing 100080; china; 2. rutherford appleton laboratory; chilton; didcot; oxon ox11 0qx; uk)
..............page:122-125
The research of SU8 resist using UV lithography
yi fu ting; zhang ju fang; peng liang qiang; han yong (synchrotron radiation facilities; institute of high energy physics; cas; beijing 100039; china)
yi fu ting; zhang ju fang; peng liang qiang; han yong (synchrotron radiation facilities; institute of high energy physics; cas; beijing 100039; china)
..............page:126-128,141
SU-8 photoresist and its application in MEMS
liu jing quan; cai bing chu; chen di; zhu jun; zhao xiao lin; yang chun sheng (research institute of micro/nanometer science & technology; shanghai jiao tong university; shanghai 200030; china)
liu jing quan; cai bing chu; chen di; zhu jun; zhao xiao lin; yang chun sheng (research institute of micro/nanometer science & technology; shanghai jiao tong university; shanghai 200030; china)
..............page:132-136
Applications of pulsed laser microfabrication technology in MEMS
li yan ning; tang jie; rao zhi jun; song xiao hui; hu xiao dong; fu xing; hu xiao tang (state key lab of precision measuring technology & instrument tianjin; university; tianjin 300072; china)
li yan ning; tang jie; rao zhi jun; song xiao hui; hu xiao dong; fu xing; hu xiao tang (state key lab of precision measuring technology & instrument tianjin; university; tianjin 300072; china)
..............page:159-163
Research on moulding of microstructure at BSRF
han yong 1; peng liang qiang 1; chen di 2; yi fu ting 1; zhang ju fang 1; huang jun rong 1 (1. institute of high energy physics; cas; beijing 100039; china; 2. research institute of micro/nanometer science and technology; shanghai jiao tong university; shanghai 200030; china)
han yong 1; peng liang qiang 1; chen di 2; yi fu ting 1; zhang ju fang 1; huang jun rong 1 (1. institute of high energy physics; cas; beijing 100039; china; 2. research institute of micro/nanometer science and technology; shanghai jiao tong university; shanghai 200030; china)
..............page:145-146
Electrochemically prepared submicron ordered porous alumina film
han yu; xie kai (pbg research center; national university of defense technology; changsha 410073; china)
han yu; xie kai (pbg research center; national university of defense technology; changsha 410073; china)
..............page:137-141
Design on X-ray masks for LIGA station in 3B1 beamline
huang jun rong 1; 2 ; peng liang qiang 1; yi fu ting 1; jiang yi jian 2; zhang ju fang 1; han yong 1 (1. institute of high energy physics; cas; beijing 100039; china; 2. national center of laser technology; beijing polytechnic university; beijing 100022; china)
huang jun rong 1; 2 ; peng liang qiang 1; yi fu ting 1; jiang yi jian 2; zhang ju fang 1; han yong 1 (1. institute of high energy physics; cas; beijing 100039; china; 2. national center of laser technology; beijing polytechnic university; beijing 100022; china)
..............page:147-150
Study on the processing technique of microstructure based on AFM
sun tao; yan yong da; xia jia fei; liang ying chun; chen kai; dong shen (precision engineering research institute; harbin institute of technology; harbin 150001; china)
sun tao; yan yong da; xia jia fei; liang ying chun; chen kai; dong shen (precision engineering research institute; harbin institute of technology; harbin 150001; china)
..............page:154-158
The fabrication technology of silicon tip
wang yan hua; sun dao heng (dept of machinery electronic engineering; xiamen university; xiamen 361005; china)
wang yan hua; sun dao heng (dept of machinery electronic engineering; xiamen university; xiamen 361005; china)
..............page:164-166
Current situation in the development of micromanipulator driven by piezoelectric actuator
rong wei bin; qu dong sheng; sun li ning (robot research institute; harbin institute of technology; harbin; 150001; china)
rong wei bin; qu dong sheng; sun li ning (robot research institute; harbin institute of technology; harbin; 150001; china)
..............page:590-594
Relative humidity effect on AFM anodic oxidation of metal film
kuang deng feng 1; liu qing gang 1; guo wei lian 2; zhang shi lin 2; hu xiao tang 1 (1. state key lab of precision measuring technology & instrument; tianjin university; tianjin 300072; china; 2. department of electronic information engineering; tianjin university; tianjin 300072; china)
kuang deng feng 1; liu qing gang 1; guo wei lian 2; zhang shi lin 2; hu xiao tang 1 (1. state key lab of precision measuring technology & instrument; tianjin university; tianjin 300072; china; 2. department of electronic information engineering; tianjin university; tianjin 300072; china)
..............page:142-144
Combine and design SPM based on commonly used platform of SPM
zhao yu le (shanghai z l micro & nano equipment co.; ltd; shanghai 200125; china)
zhao yu le (shanghai z l micro & nano equipment co.; ltd; shanghai 200125; china)
..............page:197-199
..............page:595
Nano-IC fabrication by SAL601chemical amplified negative resist
wang yun xiang; liu ming; chen bao gin; xu qiu xia (micro fabrication & nano technology lab; r&d center of microelectronics; chinese academy of sciences; beijing 100029; china)
wang yun xiang; liu ming; chen bao gin; xu qiu xia (micro fabrication & nano technology lab; r&d center of microelectronics; chinese academy of sciences; beijing 100029; china)
..............page:167-169
Study on computer simulation of proximity lithography
tian xue hong 1; liu gang 1; tian yang chao 1; zhang xin yi 2; zhang peng 1 (1 national synchrotron radiation laboratory; university of science and technology of china; hefei 230029; china; 2 synchrotron radiation research center; fudan university; shanghai 200433; china)
tian xue hong 1; liu gang 1; tian yang chao 1; zhang xin yi 2; zhang peng 1 (1 national synchrotron radiation laboratory; university of science and technology of china; hefei 230029; china; 2 synchrotron radiation research center; fudan university; shanghai 200433; china)
..............page:181-185
Progress of scanning probe lithography and study on scanning plasma etching technology
wang hai; chu jia ru; zhao gang (department of precision machinery and precision instrumentation; university of science & technology of china; hefei 230027; china)
wang hai; chu jia ru; zhao gang (department of precision machinery and precision instrumentation; university of science & technology of china; hefei 230027; china)
..............page:177-180,185
Research of dry etching simulator in micromachining
zhou rong chun; zhang hai xia; hao yi long (institute of microelectronics; peking university; beijing 100871; china)
zhou rong chun; zhang hai xia; hao yi long (institute of microelectronics; peking university; beijing 100871; china)
..............page:5-7
The influence of built-electric on the band offsets of strained MQW
xu li ping (department of physics; north china institute of technology; taiyuan 030051; china)
xu li ping (department of physics; north china institute of technology; taiyuan 030051; china)
..............page:19-21
Developments of topology optimization method and its application in micro-mechanism design
chu jin kui; hao xiu chun; wang li ding (micro system center; school of mechanical engineering; dalian university of technology; dalian 116024; china)
chu jin kui; hao xiu chun; wang li ding (micro system center; school of mechanical engineering; dalian university of technology; dalian 116024; china)
..............page:87-91
Lattice vibration quantization of staff in nano-machine and micro-machine
huang jian ping; li sheng yi; wu xue zhong; luo bing ( national university of defense science and technology; changsha 410073; china )
huang jian ping; li sheng yi; wu xue zhong; luo bing ( national university of defense science and technology; changsha 410073; china )
..............page:14-18
The test structure and examination of Au-Si bonding intensity
wang xiang; li ting; wang wei; wang ying; tian da yu; zhang da cheng (institute of microelectronics; peking university; beijing 100871; china)
wang xiang; li ting; wang wei; wang ying; tian da yu; zhang da cheng (institute of microelectronics; peking university; beijing 100871; china)
..............page:110-112
Assembly of sub-micrometer spheres into 3D periodic structure
yu shang ci; xu jing; xie kai; long yong fu (the photonic/acoustic crystal research centre; national university of defence technology; changsha 410073; china)
yu shang ci; xu jing; xie kai; long yong fu (the photonic/acoustic crystal research centre; national university of defence technology; changsha 410073; china)
..............page:129-131
Study of the demolding effects of the Ni and Ni-PTFE self-lubricated molding inserts
zhang peng; liu gang; tian yang chao (national synchrotron radiation lab; university of science and technology of china; hefei 230029; china)
zhang peng; liu gang; tian yang chao (national synchrotron radiation lab; university of science and technology of china; hefei 230029; china)
..............page:186-188
Two-photon laser three-dimensional microfabrication and three-dimensional optical data storage technology
yuan da jun 1; zhou yong jun 1; jiang zhong wei 1; huang wen hao 1; xia an dong 2; chu jia ru 1; liu yun ping 1 (1 dept of precision machinery and instrumentation; univ of sci and tech of china; hefei 230026; china; 2.molecular reaction dynamics lab; institute of chem; chinese academy of sciences; beijing 100080; china)
yuan da jun 1; zhou yong jun 1; jiang zhong wei 1; huang wen hao 1; xia an dong 2; chu jia ru 1; liu yun ping 1 (1 dept of precision machinery and instrumentation; univ of sci and tech of china; hefei 230026; china; 2.molecular reaction dynamics lab; institute of chem; chinese academy of sciences; beijing 100080; china)
..............page:173-176