..............page:29-31,43
Nanoelectronics
guo shu-tian (the24th research institute; cetc; chongqing400060; china)
..............page:6-13,24
..............page:1-5,20
Ferroelectric material in MEMS
guo dong-yun 1 ; wang yun-bo 1 ; fu cheng-ju 2 ; yu jun 1(1.huazhong university of science and technology; wuhan430074; china; 2.wuhan university of technology; wuhan430070; china)
..............page:25-28
Research of the capacitive force micro-sensor
liu jing-chun 1 ; deng yong-he 2 ; li yu-cong 2(1.dept of physics and electronic eng.jishou university; jishou416000; china; 2.dept of mathematics and physics; hunan institute of engineering; xiangtan411100; china)
..............page:37-38
..............page:14-16,36