..............page:37-40,48
Study of MEMS microactuators
chen gui-hui1; 2; zhang wan-li2; peng bin2; jiang hong-chuan2(1.physics department of xichang college; xichang 615022; china; 2.school of microelectronic & solid state electronic of uestc; chendu 610054; china)
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..............page:21-36,48
..............page:29-31,36