..............page:22-24,36
Research of Wet-Etching Groove on PYREX Glass
lin yan-fei1a; zheng zhi-xia1a; 2; zhang dan1a; feng yong-jian1b(1a.department of mechanical and electronic engineering; 1b.pen tung sah mems research center; xiamen university; xiamen 361005; china; 2.department of mechanical and electronic engineering; putian university; putian 351100; china)
..............page:33-36
Research Advances of PEBBLE Nanosensors
tian zhen-feng1; 2; guo mao-tian1; chen xing-ke1; wang hui3; wang shi-ming1; zhang rong-lan1(1.school of physics & engineering; zhengzhou university; zhengzhou 450052; china; 2.department of technical physics; zhengzhou institute of light industy; zhengzhou 450002; china; 3.institute of science; zhanjiang ocean university; zhanjiang 524025; china)
..............page:7-12,47
Correction Algorithm for Reticle-Si-Wafer Automatic Alignment Errors
liang you-sheng1; 2; cao yi-ping1; zhou jin-mei2; xing ting-wen2(1.opto-electronics department; sichuan university; chengdu 610064; china; 2.state key laboratory of optical technologiesfor microfabrication; institute of optics and electronics; chinese academy of sciences; chengdu 610209; china)
..............page:42-47