1001-5507
2005 Issue 4
An Review of MEMS-Based Microneedles Technology Developments
xu bao-jian; jin qing-hui; zhao jian-long (biochip lab; shanghai institute of microsystem and information technology; cas; shanghai 200050; china)
xu bao-jian; jin qing-hui; zhao jian-long (biochip lab; shanghai institute of microsystem and information technology; cas; shanghai 200050; china)
..............page:150-156
Research Progress on Doped SnO_2 Gas Nanosensors
yang hua-ming; du chun-fang; ouyang jing; zhang xiang-chao; su xiao-hui (department of inorganic materials; school of resources processing and bioengineering; central south university; changsha 410083; china)
yang hua-ming; du chun-fang; ouyang jing; zhang xiang-chao; su xiao-hui (department of inorganic materials; school of resources processing and bioengineering; central south university; changsha 410083; china)
..............page:145-149,156
Design and Fabrication of MEMS-Based Thermal Micro-Actuator
yang jing; gao jian-zhong; zhao yu-long; jiang zhuang-de (state key lab for manufacturing systems engineering; institute of precision engineering; xi an jiaotong university; xi an 710049; china)
yang jing; gao jian-zhong; zhao yu-long; jiang zhuang-de (state key lab for manufacturing systems engineering; institute of precision engineering; xi an jiaotong university; xi an 710049; china)
..............page:175-179
Probe Design of Arrayed Sphygmology Instrument
qi tian-huaa; gao wen-xiub (a.department of mechanical & electronic engineering; b.research center for nano science and technology; xiamen university; xiamen 361005; china)
qi tian-huaa; gao wen-xiub (a.department of mechanical & electronic engineering; b.research center for nano science and technology; xiamen university; xiamen 361005; china)
..............page:180-183
Analysis on Technique Keys for Fabricating MEMS Devices in Micro EDM
ming ping-mei1; hu yang-yang1; zhu jian2 (1.nanjing university of aeronautics & astronautics; nanjing 210016; china; 2.nanjing electronic devices institute; nanjing 210016; china)
ming ping-mei1; hu yang-yang1; zhu jian2 (1.nanjing university of aeronautics & astronautics; nanjing 210016; china; 2.nanjing electronic devices institute; nanjing 210016; china)
..............page:157-163,194
Review of the Research on Micromixer
zhu li; hou li-ya; zhang wei-yi (school of mechanical engineering; nanjing university of science & technology; nanjing 210094; china)
zhu li; hou li-ya; zhang wei-yi (school of mechanical engineering; nanjing university of science & technology; nanjing 210094; china)
..............page:164-171,199
Research of Microwave Transmission Properties of Series and Shunt RF MEMS Switch
chen gui-hui1; 2; zhang wan-li2; peng bin2; jiang hong-chuan2; zhao ze-yu3 (1.school of microelectronic & solid state electronic of uestc; chengdu 610054; china; 2.physics department of xichang college; xichang 615022; china; 3.state key lab of optical technologies for microfabrication; chengdu 610209; china)
chen gui-hui1; 2; zhang wan-li2; peng bin2; jiang hong-chuan2; zhao ze-yu3 (1.school of microelectronic & solid state electronic of uestc; chengdu 610054; china; 2.physics department of xichang college; xichang 615022; china; 3.state key lab of optical technologies for microfabrication; chengdu 610209; china)
..............page:172-174,179
In-Situ Test Structures of MEMS Thin Films Magnetic Properties
liu lin-sheng1; 2; liu su1; huang qing-an2 (1.lanzhou university; lanzhou 730000; china; 2.southeast university; nanjing 210096; china)
liu lin-sheng1; 2; liu su1; huang qing-an2 (1.lanzhou university; lanzhou 730000; china; 2.southeast university; nanjing 210096; china)
..............page:184-187
MEMS Dynamic Testing Technique
li da-chao1; 2; feng ya-lin2; fu xing1; hu xiao-dong1; jin shi-jiu1; hao yi-long2; hu xiao-tang1 (1.state key laboratory of precision measuring technology and instruments; tianjin university; tianjin 300072; china; 2.institute of microelectronics; peking university; beijing 100871; china)
li da-chao1; 2; feng ya-lin2; fu xing1; hu xiao-dong1; jin shi-jiu1; hao yi-long2; hu xiao-tang1 (1.state key laboratory of precision measuring technology and instruments; tianjin university; tianjin 300072; china; 2.institute of microelectronics; peking university; beijing 100871; china)
..............page:188-194
Development of the Optical Switch
wang gang1; ming an-jie2; liang jing-qiu2 (1.the 47th research institute; cetc; shenyang 110032; china; 2.state key lab. of applied optics; changchun institute of optics; fine mechanics and physics; chinese academy of sciences; changchun 130031; china)
wang gang1; ming an-jie2; liang jing-qiu2 (1.the 47th research institute; cetc; shenyang 110032; china; 2.state key lab. of applied optics; changchun institute of optics; fine mechanics and physics; chinese academy of sciences; changchun 130031; china)
..............page:195-199
..............page:194-200