..............page:30-32,36
Key Technology in ULSI:Nano-Scale Chemical Mechanical Polishing
zhang kai-liang; song zhi-tang; feng song-lin; chen bomy(the research center of functional semiconductor film engineering technology; state key laboratory of functional materials for informatics; shanghai institute of micro-system and information technology; chinese academy of sciences; shanghai 200050; china)
..............page:44-47
..............page:12,25,43
Quantum Dot Laser
chen peng; liu yu-liang(institute of semiconductors; chinese academy of sciences; beijing 100083; china)
..............page:19-25