..............page:16-21,50
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..............page:9-15,35
Nano-Fabrication and Nano-Electron Devices
liu ming; xie chang-qing; wang cong-shun; long shi-bing; li zhi-gang; yili cheng-rong; tu de-yu laboratory of nona-fabrication and new devices integration; institute of microelectronics of chinese academy of sciences; beijing 100029; china
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