1001-5507
2006 Issue 2
Influencing Factory Analysis of Al Thin Film CMP
yuan yu-jie; liu yu-ling; zhang yuan-xiang; cheng dong-sheng (institute of microelectronics; hebei university of technology; tianjin 300130; china)
yuan yu-jie; liu yu-ling; zhang yuan-xiang; cheng dong-sheng (institute of microelectronics; hebei university of technology; tianjin 300130; china)
..............page:107-111
Simulation of Laterally Oscillating Microresonators
wang min; wang xiao-jing; liu yong-wu; chen xiao-yang (school of mechatronics and automation; shanghai university; shanghai 200072; china)
wang min; wang xiao-jing; liu yong-wu; chen xiao-yang (school of mechatronics and automation; shanghai university; shanghai 200072; china)
..............page:98-101
..............page:112
Photonic Crystal Microcavity Light-Emitting Diode
luo yan-heng; zhang rui-jun (the 44th research institute of cetc; chongqing 400060; china)
luo yan-heng; zhang rui-jun (the 44th research institute of cetc; chongqing 400060; china)
..............page:80-84,94
Fabrication of Silicon Single Electron Transistors
zhang yang; han wei-hua; yang fu-hua (institute of semiconductors; chinese academy of sciences; beijing 100083; china)
zhang yang; han wei-hua; yang fu-hua (institute of semiconductors; chinese academy of sciences; beijing 100083; china)
..............page:73-79
Progress of Semiconductor Photonic Crystal Active Devices
tang hai-xia; wang qi-ming (resecarch centre of opti-electro; institute of semiconductors; chinese academy of sciences; beijing 100083; china)
tang hai-xia; wang qi-ming (resecarch centre of opti-electro; institute of semiconductors; chinese academy of sciences; beijing 100083; china)
..............page:65-72
..............page:72
Computation of Electrostatic Forces with Edge Effects for Micro-Structures
zhao jian; wang hong-xi; jia jian-yuan (school of electro-mechanical engineering; xidian university; xi an 710071; china)
zhao jian; wang hong-xi; jia jian-yuan (school of electro-mechanical engineering; xidian university; xi an 710071; china)
..............page:95-97,111
Formation of Langmuir-Blodgett Monolayer of Nano Gold Particles
qu peng; wang ying; zhang ya-fei (institute of micro and nano science and technology; shanghai jiaotong university; national key laboratory of nano/micro fabrication technology; key laboratory for thin film and microfabrication of ministry of education; bio-x dna computer consortium; shanghai 200030; china)
qu peng; wang ying; zhang ya-fei (institute of micro and nano science and technology; shanghai jiaotong university; national key laboratory of nano/micro fabrication technology; key laboratory for thin film and microfabrication of ministry of education; bio-x dna computer consortium; shanghai 200030; china)
..............page:85-88,106
Molecular Dynamics Simulations of "Y"-Shaped,Bamboo-Shaped, and Straight Carbon Nanotubes Under Tensile Load
shen hai-jun; mu xian-cai (school of aeronautics & astronautics; nanjing university of aeronautics & astronautics; nanjing 210016; china)
shen hai-jun; mu xian-cai (school of aeronautics & astronautics; nanjing university of aeronautics & astronautics; nanjing 210016; china)
..............page:89-94
Laser Stage System for E-Beam Lithography Machine
qiao jun-xian1; 2; wang zhao-zhi1; hu song1; zhang zheng-rong1; xing wei1; tang xiao-ping1; wang shu-rong1 (1.institute of optics and electronics; chinese academy of sciences; chengdu 610209; china; 2.graduate school of the chinese academy of sciences; beijing 100039; china)
qiao jun-xian1; 2; wang zhao-zhi1; hu song1; zhang zheng-rong1; xing wei1; tang xiao-ping1; wang shu-rong1 (1.institute of optics and electronics; chinese academy of sciences; chengdu 610209; china; 2.graduate school of the chinese academy of sciences; beijing 100039; china)
..............page:102-106
..............page:112