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Textured ZnO Transparent Conductive Thin Film Prepared by Mid-Frequency Magnetron Sputtering
liu jia-yu1; 2; yang rui-xia1; niu chen-liang1; xue jun-ming2; zhao ying2; geng xin-hua21.school of information engineering; hebei university of technology; tianjin 300130; china; 2.institute of photo-electronic thin film devices and technique of nankai university; key laboratory of photoelectronics thin film devices and technique of tianjin; key laboratory of optoelectronic information science and technology; chinese ministry of education; tianjin 300071; china
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