..............page:145-152
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Research for GaN-Based Materials and Epitaxy Growth Technologies
liu yibing1; 2; huang xinmin1; 2; liu guohua1; 2 (1. college of electrical and information engineering; hunan university; changsha 410082; china; 2. department of mechanical and electrical engineering; shaoyang professional-technology college; shaoyang 422000; china)
..............page:153-157
..............page:166-169
Study on Double Diffusion Barriers of Cu Metallization
wang xiaodong1; ji yuan2a; zhong taoxing2a; li zhiguo2b; xia yang3; liu danmin2a; xiao weiqiang2a ( 1. basic department; the chinese people s armed police forces academy; langfang 065000; china; 2. a. institute of microstructure and property of advanced materials; b. school of electronic information & control engineering; beijing university of technology; beijing 100022; china; 3. microelectronics r&d center; the chinese academy of sciences; beijing 100029; china )
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..............page:136-139
..............page:125-130,157
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