..............page:193-197
..............page:240-244
..............page:246-247
Review on MEMS Microwave Filters
ouyang weixia; zhang yonghua; wang chao; guo xinglong; lai zongsheng (institute of microelectronics circuit & system; east china normal university; shanghai 200241; china)
..............page:214-218,234
..............page:205-208
..............page:198-204
..............page:187-192,197
..............page:219-221
..............page:209-213
..............page:231-234
Overview of Alignment of Nanometer Lithography Techniques
zhou shaolin1; 2 ; tang xiaoping1 ; hu song1 ; ma ping1 ; chen wangfu1; 2 ; yang yong1; 2 ; yan wei1 (1. institute of optics & electronics; chinese academy of sciences; chengdu 610209; china; 2. graduate school; chinese academy of sciences; beijing 100039; china)
..............page:222-230
Tensile Tests on 1D Nano-Structures
jin qinhua 1; 2; wang yuelin 1; 2; li tie 2; (1. institute of micro and nano science and technology; shanghai jiaotong university; shanghai 200030; china; 2. shanghai institute of microsystem and information technology; cas; shanghai 200050; china)
..............page:235-239,244