..............page:293-297
..............page:298-301
Study of a Seesaw-Lever RF MEMS Switch
liu maozhe1; li quanbao1; 2; jiao binbin1; gao chaoqun1; luo xiaoguang1; 3; jing yupeng1; ye tianchun1(1.institute of microelectronics of chinese academy of sciences; beijing 100029; china; 2.college of physics and microelectronics of shandong university; ji nan 250100; china; 3.college of physics of changchun science and technology university; changchun 130000; china)
..............page:282-286
..............page:268-270,297
..............page:260-263
..............page:255-259
..............page:264-267,286
..............page:249-254
Status and Progress of MEMS Variable Capacitors
li lingyu1; 2; tong fu1; 2; yang yuehan1; 2; zhao jianming1; liu haiwen2 (1.state key laboratory of electronic thin films and integrated devices; university of electronic science and technology of china; chengdu 610054; china; 2.state key laboratory of optical technologies for microfabrication; institute of optics & electronics; chinese academy of sciences; chengdu 610209; china)
..............page:287-292
..............page:302-306
..............page:271-274,292
..............page:275-281
..............page:307-310