1001-5507
2009 Issue 11
..............page:705-706
Research on Pattern Shift in Si Epitaxial Process
zhao lixia1; 2; zhang heming2(1.hebei poshing electronics technology co.; ltd.; shijiazhuang 050200; china; 2.school of microelectronics; xidian university; xi an 710071; china)
zhao lixia1; 2; zhang heming2(1.hebei poshing electronics technology co.; ltd.; shijiazhuang 050200; china; 2.school of microelectronics; xidian university; xi an 710071; china)
..............page:691-694
Trends of MEMS-Based Piezoelectric Vibration Energy Harvesters
sun jian1; li yigui1; liu jingquan1; yang chunsheng1; he dannong2(1.national key laboratory of nano/micro fabrication technology; key laboratory for thin film and microfabrication of ministry of education; institute of micro and nano science and technology; shanghai jiaotong university; shanghai 200240; china; 2.national engineering research center for nanotechnology; shanghai 200241; china)
sun jian1; li yigui1; liu jingquan1; yang chunsheng1; he dannong2(1.national key laboratory of nano/micro fabrication technology; key laboratory for thin film and microfabrication of ministry of education; institute of micro and nano science and technology; shanghai jiaotong university; shanghai 200240; china; 2.national engineering research center for nanotechnology; shanghai 200241; china)
..............page:673-677,690
Study of Micro-Channel Cooling High Power Semiconductor Laser
huang ke; yang hongwei; che xianghui; peng haitao; wang yuanyuan; xu huiwu(the 13th research institute; cetc; shijiazhuang 050051; china)
huang ke; yang hongwei; che xianghui; peng haitao; wang yuanyuan; xu huiwu(the 13th research institute; cetc; shijiazhuang 050051; china)
..............page:656-659
Study of Amorphous Silicon Thin Films by PECVD
gu weidong; xu chao; li yanli(the 13th research institute; cetc; shijiazhuang 050051; china)
gu weidong; xu chao; li yanli(the 13th research institute; cetc; shijiazhuang 050051; china)
..............page:664-666
..............page:694
Research Advances of the Bonding Strength Measurements in MEMS
li renfeng(institute of electronic engineering; china academy of engineering physics; mianyang 621900; china)
li renfeng(institute of electronic engineering; china academy of engineering physics; mianyang 621900; china)
..............page:678-683
Research Progress of Silicon-Based Optical Interconnects
cheng yongpeng; chen shaowu(state key laboratory on integrated optoelectronics; institute of semiconductors; chinese academy of sciences; beijing 100083; china)
cheng yongpeng; chen shaowu(state key laboratory on integrated optoelectronics; institute of semiconductors; chinese academy of sciences; beijing 100083; china)
..............page:649-655,672
Progress in Silicon Nanowire Field Effect Transistors
zhang yanbo; xiong ying; yang xiang; han weihua; yang fuhua(research center of semiconductor integration technology; institute of semiconductors; chinese academy of science; beijing 100083; china)
zhang yanbo; xiong ying; yang xiang; han weihua; yang fuhua(research center of semiconductor integration technology; institute of semiconductors; chinese academy of science; beijing 100083; china)
..............page:641-648,663
Research Progress on the Hydrogen Content Control of Hydrogenated Amorphous Silicon Thin Films
zhang wei; zhou jianwei; liu yuling; zhao zhiwen; zhang jin; yang yulou (institute of microelectronics; hebei university of technology; tianjin 300130; china)
zhang wei; zhou jianwei; liu yuling; zhao zhiwen; zhang jin; yang yulou (institute of microelectronics; hebei university of technology; tianjin 300130; china)
..............page:667-672
A High Performance CMOS Sample and Hold Circuit
liu minjiea; chi baoyongb; liu yunfenga; dong jingxina(a.state key laboratory of precision measurement technology and instruments; department of precision instruments and mechanology; b.institute of microelectronics; tsinghua university; beijing 100084; china)
liu minjiea; chi baoyongb; liu yunfenga; dong jingxina(a.state key laboratory of precision measurement technology and instruments; department of precision instruments and mechanology; b.institute of microelectronics; tsinghua university; beijing 100084; china)
..............page:700-704
Process Improvement of Surface Texturization of Monocrystalline Silicon for Solar Cells
yan baohua; tan baimei; liu yuling; sun zengbiao; shen xiaoning; zhang yan(institute of microelectronics; hebei university of technology; tianjin 300130; china)
yan baohua; tan baimei; liu yuling; sun zengbiao; shen xiaoning; zhang yan(institute of microelectronics; hebei university of technology; tianjin 300130; china)
..............page:695-699
Effect of Annealing Temperature on Tb-Catalyzed GaN Nanorods
chen jinhua1; shi xin1; xue chengshan2(1. department of information and electronic engineering; zhenjiang vocational college of mechanical & electrical technology; zhenjiang 212016; china; 2.institute of semiconductors; shandong normal university; jinan 250014; china)
chen jinhua1; shi xin1; xue chengshan2(1. department of information and electronic engineering; zhenjiang vocational college of mechanical & electrical technology; zhenjiang 212016; china; 2.institute of semiconductors; shandong normal university; jinan 250014; china)
..............page:660-663
Nanometer and Submicron Electrochemical Micromachining Using Ultra-Short Voltage Pulses
zhang zhaoyang1; 2; mao weiping1; chen fei1(1.school of mechanical engineering; jiangsu university; zhenjiang 212013; china; 2.college of mechanical and electrical engineering; nanjing university of aeronautics and astronautics; nanjing 210016; china)
zhang zhaoyang1; 2; mao weiping1; chen fei1(1.school of mechanical engineering; jiangsu university; zhenjiang 212013; china; 2.college of mechanical and electrical engineering; nanjing university of aeronautics and astronautics; nanjing 210016; china)
..............page:684-690