1001-5507
2009 Issue 12
..............page:768
Failure Analysis of MEMS Accelerometers with Comb Structures Under Shock
lin zhoufeng1; 2; cai wei2; xu aibin2; zhuang zhiqiang1 (1.key laboratory of specially functional materials; ministry of education; college of materials science and engineering; south china university of technology; guangzhou 510640; china; 2.national key laboratory for reliability physics and its application technology of electrical component; the 5thelectronics research institute of the ministry of industry and information technology; guangzhou 510610; china)
lin zhoufeng1; 2; cai wei2; xu aibin2; zhuang zhiqiang1 (1.key laboratory of specially functional materials; ministry of education; college of materials science and engineering; south china university of technology; guangzhou 510640; china; 2.national key laboratory for reliability physics and its application technology of electrical component; the 5thelectronics research institute of the ministry of industry and information technology; guangzhou 510610; china)
..............page:764-768
guo ji shi dian
wang shu hua ; wang ling
wang shu hua ; wang ling
..............page:769-772
Parameter Optimization Based on High-Aspect Ratio Si Dry Etching
chen shaojun; li yigui(key laboratory for thin film and microfabrication technology of ministry of education; national key laboratory of micro/nano fabrication technology; research institute of micro/nano science and technology; shanghai jiao tong university; shanghai 200240; china)
chen shaojun; li yigui(key laboratory for thin film and microfabrication technology of ministry of education; national key laboratory of micro/nano fabrication technology; research institute of micro/nano science and technology; shanghai jiao tong university; shanghai 200240; china)
..............page:750-754
Fabrication of High Aspect Ratio Muti-Steps on Si by Dry Etching
liu peng; zhang dacheng; li ting; luo kui; tian dayu; li jing(institute of microelectronics; peking university; beijing 100871; china )
liu peng; zhang dacheng; li ting; luo kui; tian dayu; li jing(institute of microelectronics; peking university; beijing 100871; china )
..............page:755-757,763
ANSYS Simulation on the Dissemination State of SAW Resonators
chen yingduan1; 2; gao yang2; 3; bai zhuchuan4; liu tingting1(1.information engineering school; southwest university of science and technology; mianyang 621010; china; 2.institute of electronic engineering; china academy of engineering physics; mianyang 621900; china; 3.key laboratory of optoelectronic technology and system; chongqing university; chongqing 400044; china; 4.information engineering school; southwest university of science and technology; mianyang 621010; china)
chen yingduan1; 2; gao yang2; 3; bai zhuchuan4; liu tingting1(1.information engineering school; southwest university of science and technology; mianyang 621010; china; 2.institute of electronic engineering; china academy of engineering physics; mianyang 621900; china; 3.key laboratory of optoelectronic technology and system; chongqing university; chongqing 400044; china; 4.information engineering school; southwest university of science and technology; mianyang 621010; china)
..............page:739-743,749
Technology of Micro Droplet Atomizers Based on Surface Acoustic Wave
zhang guan; li yigui; zhang junfeng; yang chunsheng; liu jingquan(national key laboratory of micro/nano fabrication technology; key laboratory for thin film and microfabrication technology of ministry of education; research institute of micro/nano science and technology; shanghai jiao tong university; shanghai 200240; china)
zhang guan; li yigui; zhang junfeng; yang chunsheng; liu jingquan(national key laboratory of micro/nano fabrication technology; key laboratory for thin film and microfabrication technology of ministry of education; research institute of micro/nano science and technology; shanghai jiao tong university; shanghai 200240; china)
..............page:726-729
A Novel 3-Degree-of-Freedom(3-DOF)Oscillational MEMS Gyroscope
zhu kuibao; yang yongjun; li bo; lu xinyan; gao zhenning(the 13th research institute; cetc; shijiazhuang 050051; china)
zhu kuibao; yang yongjun; li bo; lu xinyan; gao zhenning(the 13th research institute; cetc; shijiazhuang 050051; china)
..............page:730-734
Application of FIR Digital Filters in MEMS Accelerometers
gu weidong; lu xinyan(the 13th research institute; cetc; shijiazhuang 050051; china)
gu weidong; lu xinyan(the 13th research institute; cetc; shijiazhuang 050051; china)
..............page:735-738
MEMS Probe Cards for IC Industry
cheng rong; jiang kewei; wang fei; li xinxin(state key laboratory of transducer technology; shanghai institute of microsystem and information technology; chinese academy of sciences; shanghai 200050; china)
cheng rong; jiang kewei; wang fei; li xinxin(state key laboratory of transducer technology; shanghai institute of microsystem and information technology; chinese academy of sciences; shanghai 200050; china)
..............page:705-714
Progress of SAW Gas Sensors
li haofeng; jia rui; li weilong; chen chen; liu ming(institute of microelectronics; chinese academy of sciences; beijing 100029; china)
li haofeng; jia rui; li weilong; chen chen; liu ming(institute of microelectronics; chinese academy of sciences; beijing 100029; china)
..............page:715-719,738
..............page:698-699
..............page:776
..............page:773-776
On-Line Examination Method of Bonding Strength Measurement in Silicon MEMS Devices
li renfeng1; ma kai2; zheng yingbin1; yuan mingquan1; shi zhigui1; wu jiali1(1.institute of electronic engineering; china academy of engineering physics; mianyang 621900; china; 2.department of engineering mechanics; school of sciences; xi an university of technology; xi an 710048; china)
li renfeng1; ma kai2; zheng yingbin1; yuan mingquan1; shi zhigui1; wu jiali1(1.institute of electronic engineering; china academy of engineering physics; mianyang 621900; china; 2.department of engineering mechanics; school of sciences; xi an university of technology; xi an 710048; china)
..............page:758-763
Experiment Investigation of Enhancement Micromixing by Microbubble Actuators
wang bin1a; 1b; 2; xu jinliang1a; 1b; liu guohua1a; 1b; 2; xu li1a; 1b; 2(1.a. micro energy system laboratory; b.key laboratory of renewable energy and gas hydrate; guangzhou institute of energy conversion; chinese academy of sciences; guangzhou 510640; china; 2.graduate university; chinese academy of sciences; beijing 100049; china)
wang bin1a; 1b; 2; xu jinliang1a; 1b; liu guohua1a; 1b; 2; xu li1a; 1b; 2(1.a. micro energy system laboratory; b.key laboratory of renewable energy and gas hydrate; guangzhou institute of energy conversion; chinese academy of sciences; guangzhou 510640; china; 2.graduate university; chinese academy of sciences; beijing 100049; china)
..............page:720-725
..............page:768
A Method of Fabricating Polymer Solid Microneedles
xiao lijun; chen xiang; wang peng; li yigui; chen di (key laboratory for thin film and microfabrication of ministry of education; national key laboratory of nano/micro fabrication technology; institute of mico and nano science and technology; shanghai jiaotong university; shanghai 200240; china)
xiao lijun; chen xiang; wang peng; li yigui; chen di (key laboratory for thin film and microfabrication of ministry of education; national key laboratory of nano/micro fabrication technology; institute of mico and nano science and technology; shanghai jiaotong university; shanghai 200240; china)
..............page:744-749