Semiconductor Information 2010 Issue 10 Research on the Method of Interferometric-Spatial-Phase for the Alignment of Lithography

Journals A B C D E F G H I J K L M N O P Q R S T U V W X Y Z

Semiconductor Information
1001-5507
2010 Issue 10

..............page:634-637,642

..............page:629-633,651

Application of Electromagnetic MEMS for Flow Control
Qian Jisheng;Sha Sha;Chen Zhihua;Yi Wenjun

..............page:614-618

Hexagonal Defects Analysis of GaN Epilayers Grown on Si Substrates
Yin Jiayun;Liu Bo;Wang Jingjing;Zhou Rui;Li Jia;Dun Shaobo;Feng Zhihong

..............page:603-605

Nitridation of GaAs Substrates to Grow GaN by HVPE Method
Zhang Song1;Yang Ruixia1;Xu Yongkuan2;Li Qiang2

..............page:610-613,618

..............page:638-642

Effect of pH Regulators on CMP Rate of Silicon
Yang Jinbo;Liu Yuling;Liu Xiaoyan;Hu Yi;Sun Ming

..............page:643-646

..............page:589-594

..............page:652

Application of CAM and SPC on Semiconductor Process Line
Li Baodi;Liu Fuqing;Li Yanwei;Yang Zhongyue;Hu Ling;Cui Yuxing;Fu Xingchang

..............page:647-651

Terahertz Wave Sources Made by Resonant Tunneling Devices
Guo Weilian1;2;3;Niu Pingjuan1;Li Xiaoyun1;Gu Xiao1;He Qingguo2;Feng Zhihong2;Tian Aihua2;Zhang Shilin3;Mao Luhong3

..............page:595-602,623

..............page:594

Fabrication and Characteristics of Bi_3.5Yb_0.5Ti₃O₁₂ Ferroelectric Thin Films
Cheng Chuanpin;Deng Yonghe;Dai Xiongying;Xiao Gang

..............page:606-609

..............page:624-628

..............page:619-623