1001-5507
2010 Issue 2
Particulate Wiping off After Chemical Mechanical Polishing of Copper Multilevel Interconnects
wu caixia; liu yuling; niu xinhuan; kang haiyan; su yanqin(institute of microelectronics; hebei university of technology; tianjin 300130; china)
wu caixia; liu yuling; niu xinhuan; kang haiyan; su yanqin(institute of microelectronics; hebei university of technology; tianjin 300130; china)
..............page:110-114
Novel Method of Electron Scattering Parameters Determination
zhao min1; chen baoqin2; xie changqing2; liu ming2; niu jiebin2(1.school of information and technology; zhanjiang normal university; zhanjiang 524048; china; 2.key laboratory of nano-fabrication and novel devices integrated technology; institute of microelectronics; chinese academy of sciences; beijing 100029; china)
zhao min1; chen baoqin2; xie changqing2; liu ming2; niu jiebin2(1.school of information and technology; zhanjiang normal university; zhanjiang 524048; china; 2.key laboratory of nano-fabrication and novel devices integrated technology; institute of microelectronics; chinese academy of sciences; beijing 100029; china)
..............page:115-120
Device of Energy Uniformity Array Phase Ring
wan qingsong1; 2; xie changqing1; jia jia1; pan yiming1; liu ming1; wu xiulong2; chen junning2(1.key lab of nano-fabrication and novel devices integrated technology; institute of microelectronics; chinese academy of sciences; beijing 100029; china; 2.school of electronic science and technology; anhui university; hefei 230039; china)
wan qingsong1; 2; xie changqing1; jia jia1; pan yiming1; liu ming1; wu xiulong2; chen junning2(1.key lab of nano-fabrication and novel devices integrated technology; institute of microelectronics; chinese academy of sciences; beijing 100029; china; 2.school of electronic science and technology; anhui university; hefei 230039; china)
..............page:121-124
cai liao ji shu chan pin he shi chang
wang ling ; wang shu hua
wang ling ; wang shu hua
..............page:125-128
Capacitive RF MEMS Resonators
jia yingqian1; 2; zhao zhengping1; 3; yang yongjun2; wang lifa1(1.school of information engineering; hebei university of technology; tianjin 300130; china; 2.the 13th research institute; cetc; shijiazhuang 050051; china; 3.china electronics technology group corporation; beijing 100846; china)
jia yingqian1; 2; zhao zhengping1; 3; yang yongjun2; wang lifa1(1.school of information engineering; hebei university of technology; tianjin 300130; china; 2.the 13th research institute; cetc; shijiazhuang 050051; china; 3.china electronics technology group corporation; beijing 100846; china)
..............page:99-104
New Fabrication of Retina Electrodes by Micro-Patterning of PI
xu min; chen di; zhou ran; chen xiang; zhu jun; liu jingquan(key laboratory for thin film and microfabrication technology of ministry of education; national key laboratory of micro/nano fabrication technology; research institute of micro/nano science and technology; shanghai jiao tong university; shanghai 200240; china)
xu min; chen di; zhou ran; chen xiang; zhu jun; liu jingquan(key laboratory for thin film and microfabrication technology of ministry of education; national key laboratory of micro/nano fabrication technology; research institute of micro/nano science and technology; shanghai jiao tong university; shanghai 200240; china)
..............page:105-109
MOCVD Growth of 670nm LED Materials
liu yingbin; lin lin; chen hongtai; yuan fengpo; li yun(the 13th research institute of china electronics technology group corporation; shijiazhuang 050051; china)
liu yingbin; lin lin; chen hongtai; yuan fengpo; li yun(the 13th research institute of china electronics technology group corporation; shijiazhuang 050051; china)
..............page:85-88
Development of One-Dimensional Nano-Materials Alignment Technology
hu lin; chen changxin; zhang yafei(key laboratory for thin film and microfabrication technology of ministry of education; national key laboratory of micro/nano fabrication technology; research institute of micro/nano science and technology; shanghai jiao tong university; shanghai 200240; china)
hu lin; chen changxin; zhang yafei(key laboratory for thin film and microfabrication technology of ministry of education; national key laboratory of micro/nano fabrication technology; research institute of micro/nano science and technology; shanghai jiao tong university; shanghai 200240; china)
..............page:80-84,114
Growth of AlN Film by HVPE Method
xu yongkuan; li qiang; cheng hongjuan; yin haifeng; yu xianglu; yang dandan; liu jinxin; yue yang; zhang feng(the 46th research institute; cetc; tianjin 300220; china)
xu yongkuan; li qiang; cheng hongjuan; yin haifeng; yu xianglu; yang dandan; liu jinxin; yue yang; zhang feng(the 46th research institute; cetc; tianjin 300220; china)
..............page:89-92
Research on an Improved Junction Termination Structure for 4H-SiC BJTs
liu xilin; zhang bo; zhang yourun; deng xiaochuan(state key laboratory of electronic thin films and integrated devices; university of electronic science and technology of china; chengdu 610054; china)
liu xilin; zhang bo; zhang yourun; deng xiaochuan(state key laboratory of electronic thin films and integrated devices; university of electronic science and technology of china; chengdu 610054; china)
..............page:76-79
Simulation and Fabrication of an SMA Electro-Thermal Actuator with Si/TiNi Bimorph Structure
wang yapan; wu yibo; zhang xiaobo; zhang congchun; yang chunsheng(key laboratory for thin film and microfabrication technology of ministry of education; national key laboratory of micro/nano fabrication technology; research institute of micro/nano science and technology; shanghai jiao tong university; shanghai 200240; china)
wang yapan; wu yibo; zhang xiaobo; zhang congchun; yang chunsheng(key laboratory for thin film and microfabrication technology of ministry of education; national key laboratory of micro/nano fabrication technology; research institute of micro/nano science and technology; shanghai jiao tong university; shanghai 200240; china)
..............page:93-98
High Efficiency and High Power CW Semiconductor Lasers
yang hongwei; huang ke; chen hongtai; zhang shizu; ren yongxue(the 13th research institute; cetc; shijiazhuang 050051; china)
yang hongwei; huang ke; chen hongtai; zhang shizu; ren yongxue(the 13th research institute; cetc; shijiazhuang 050051; china)
..............page:71-75
..............page:59-60
Damage-Free Cleaning Technology with Supercritical CO_2
wang lei; hui yu; gao chaoqun; jing yupeng(integrated circuit advanced process center; institute of microelectronics of chinese academy of science; beijing 100029; china)
wang lei; hui yu; gao chaoqun; jing yupeng(integrated circuit advanced process center; institute of microelectronics of chinese academy of science; beijing 100029; china)
..............page:65-70,79