1001-5507
2010 Issue 3
RF MEMS Tunable Inductors
fang dongming; zhang haixia(national key laboratory of nano/micro fabrication technology; institute of microelectronics; peking university; beijing 100871; china)
fang dongming; zhang haixia(national key laboratory of nano/micro fabrication technology; institute of microelectronics; peking university; beijing 100871; china)
..............page:129-135
Fabrication and Measurement of 3333 l/mm X-Ray Self-Standing Transmission Gratings
li hailiang1; 2; ma jie2; zhu xiaoli2; wu jian1; xie changqing2; chen baoqin2; liu ming2(1.institute of laser engineering; beijing university of technology; beijing 100022; china; 2.key laboratory of nano-fabrication and novel devices integrated technology; institute of microelectronics; chinese academy of sciences; beijing 100029; china)
li hailiang1; 2; ma jie2; zhu xiaoli2; wu jian1; xie changqing2; chen baoqin2; liu ming2(1.institute of laser engineering; beijing university of technology; beijing 100022; china; 2.key laboratory of nano-fabrication and novel devices integrated technology; institute of microelectronics; chinese academy of sciences; beijing 100029; china)
..............page:174-178
UV-NIL Soft Mold Fabricated by PDMS Diluted with Silicon Oil
li haixin; huang qiyu(school of microelectronics; shanghai jiao tong university; shanghai 200240; china)
li haixin; huang qiyu(school of microelectronics; shanghai jiao tong university; shanghai 200240; china)
..............page:188-192
4H-SiC Schottky Betavoltaic Micro Battery
gao peng; li xiaoying; qiao dayong; yao xianwang; zang bo(micro and nano electromechanical systems laboratory; northwestern polytechnical university; xi an 710072; china)
gao peng; li xiaoying; qiao dayong; yao xianwang; zang bo(micro and nano electromechanical systems laboratory; northwestern polytechnical university; xi an 710072; china)
..............page:157-162
FEM Analysis on the Electroforming Property of Metallic Microstructures
zheng xiaohu; liu yuanwei; gu feng(jiangsu key construction lab.of numeric machining tech.; huaiyin institute of technology; huaian 223003; china)
zheng xiaohu; liu yuanwei; gu feng(jiangsu key construction lab.of numeric machining tech.; huaiyin institute of technology; huaian 223003; china)
..............page:183-187
Design and Fabrication of MEMS Millimeter-Wave Filters
li qian; yang zhi; hu xiaodong(the 13th research institute; cetc; shijiazhuang 050051; china)
li qian; yang zhi; hu xiaodong(the 13th research institute; cetc; shijiazhuang 050051; china)
..............page:170-173,178
Fabrication and Hydrogen Sensing Properties of Nb-Doped TiO_2 Nanotubes
bai shuo1; ding dongyan1; ning congqin2; qin rui1; chang chengkang1; li ming1; mao dali1(1.state key laboratory of metal matrix composites; institute of microelectronic materials and technology; school of materials science and engineering; shanghai jiao tong university; shanghai 200240; china; 2.state key laboratory of high performance ceramics and superfine microstructure; shanghai institute of ceramics; chinese academy of sciences; shanghai 200050; china)
bai shuo1; ding dongyan1; ning congqin2; qin rui1; chang chengkang1; li ming1; mao dali1(1.state key laboratory of metal matrix composites; institute of microelectronic materials and technology; school of materials science and engineering; shanghai jiao tong university; shanghai 200240; china; 2.state key laboratory of high performance ceramics and superfine microstructure; shanghai institute of ceramics; chinese academy of sciences; shanghai 200050; china)
..............page:147-151
Process Research of Novel UV Nanoimprint Lithography Resist with Enhanced Anti-Sticking Property
li zhongjiea; lin hongb; jiang xuesongb; wang qingkanga; yin jieb(a.key laboratory for thin film and microfabrication technology of ministry of education; national key laboratory of micro /nano fabrication technology; research institute of micro/nano science and technology; b.research institute of polymer materials; school of chemistry & chemical technology; shanghai jiao tong university; shanghai 200240; china)
li zhongjiea; lin hongb; jiang xuesongb; wang qingkanga; yin jieb(a.key laboratory for thin film and microfabrication technology of ministry of education; national key laboratory of micro /nano fabrication technology; research institute of micro/nano science and technology; b.research institute of polymer materials; school of chemistry & chemical technology; shanghai jiao tong university; shanghai 200240; china)
..............page:179-182,192
Research on Nanoscale Molecular Electronic Devices
zhang yaozhong; zhang yafei(key laboratory for thin film and microfabrication of the ministry of education; national key laboratory of nano/micro fabrication technology; research institute of micro/nano science and technology; shanghai jiao tong university; shanghai 200240; china)
zhang yaozhong; zhang yafei(key laboratory for thin film and microfabrication of the ministry of education; national key laboratory of nano/micro fabrication technology; research institute of micro/nano science and technology; shanghai jiao tong university; shanghai 200240; china)
..............page:136-141,169
..............page:151
Effects of Viscous Dissipation on Micro Nozzle's Performance
tong junjie1; 2; xu jinliang1; cen jiwen1(1.micro energy system laboratory; guangzhou institute of energy conversion; chinese academy of sciences; guangzhou 510640; china; 2.guangdong ocean university of technology; zhanjiang 524006; china)
tong junjie1; 2; xu jinliang1; cen jiwen1(1.micro energy system laboratory; guangzhou institute of energy conversion; chinese academy of sciences; guangzhou 510640; china; 2.guangdong ocean university of technology; zhanjiang 524006; china)
..............page:163-169
Progress in the Effect of Morphology on the Properties of LiFePO_4
bai lipeng; li qiuhong; chen libao; chen jie; wang taihong(institute of physics and microelectronics science; hunan university; changsha 410082; china)
bai lipeng; li qiuhong; chen libao; chen jie; wang taihong(institute of physics and microelectronics science; hunan university; changsha 410082; china)
..............page:152-156
Error Analysis of Laser Diode Array in Spectrum Synthesis Simulation
yin shizhong1; su mingmin2; wang xiaoyan3(1.hebei xingtai university; xingtai 054001; china; 2.information engineering school; hebei university of technology; tianjin 300130; china; 3.the 13th research institude; cetc; shijiazhuang 050051; china)
yin shizhong1; su mingmin2; wang xiaoyan3(1.hebei xingtai university; xingtai 054001; china; 2.information engineering school; hebei university of technology; tianjin 300130; china; 3.the 13th research institude; cetc; shijiazhuang 050051; china)
..............page:142-146