RF MEMS Tunable Inductors(Continued)
fang dongming; zhang haixia (national key laboratory of nano/micro fabrication technology; institute of microelectronics; peking university; beijing 100871; china)
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Design of BCB/SiO_2 Dual-Core Stacked ARROW Pressure Sensors
yu zhong1; li rong2; wang hairong1; jiang zhuangde1(1.state key laboratory for manufacturing system engineering; xi an jiao tong university; xi an 710049; china; 2.xi an institute of eletromechanical information technology; xi an 710065; china)
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..............page:223-227
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..............page:249-252
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..............page:202-206
..............page:213-216,222
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