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Semiconductor Information
1001-5507
2012 Issue 12
Design and Control of Ion Implantation in the Fabrication of Silicon Detectors
Tang Hailin;Luo Jianbo;Zhang Li;Tan Gang
..............page:824-828
Reliability Study of Non-Silicon MEMS Inertia Switches
Liu Jiakai;Qi Xinglin
..............page:802-806
Research of Removing the Damage and Pollutants on Si Surface by Micro Ethcing
Tian Qiaowei;Tan Baimei;Gao Baohong;Huang Yanyan;Liu Nan;Su Weidong
..............page:820-823
Analysis and Research on Monte Carlo Simulation of the Low-Energy Electron Beam Lithography Process
Wu Peng;Pan Jiangyong;Zhou Zaifa
..............page:812-819,828
Current Status and Development of Nuclear Magnetic Resonance Microgyroscopes
Li Pan;Liu Yuanzheng;Wang Jiliang
..............page:769-774,785
Research of the Cleaning Method for Particles on the Surface of Multilevel Copper Interconnects after CMP
Yang Fei;Tan Baimei;Gao Baohong;Su Weidong;Tian Qiaowei;Liu Nan
..............page:829-832
Research on the Arrayed Bionic Vector Hydrophone with High Sensitivity and Wide Frequency Band
Song Xiaopenga;b;Xue Chenyanga;b;Zhang Guojuna;b;Liu Linxiana
..............page:790-795
TDDFT Research of C3 Molecular Wire in the Laser Field
Wang Zhiping;Wu Shouyu;Zhang Xiumei;Wang Liguang
..............page:786-789,811
Design and Analysis of the Z-Axis Fully Differential Capacitive Accelerometer Sensor
Xu Gaobin;Han Chengcheng;Chen Xing
..............page:796-801
Research Progresses of the FinFET Based on Metal Gate/High-k
Li Yue;Huang Anping;Zheng Xiaohu;Wang Mei;Xiao Zhisong
..............page:775-780