1001-5507
2015 Issue 12
..............page:1-4
Research Progress on the Nanoscale Phase Change Random Access Memory Miniaturization
Zhou Yaling;Fu Yingchun;Wang Xiaofeng;Wang Xiaodong;Yang Fuhua;Engineering Research Center for Semiconductor Integrated Technology;Institute of Semiconductors;Chinese Academy of Sciences;
Zhou Yaling;Fu Yingchun;Wang Xiaofeng;Wang Xiaodong;Yang Fuhua;Engineering Research Center for Semiconductor Integrated Technology;Institute of Semiconductors;Chinese Academy of Sciences;
..............page:749-756
Preparation and Photocatalytic Properties of Zinc-Doped Nickel Oxide Nanowires
Zhao Chongyang;Xiang Wenfeng;Zhang Jiaqi;Wang Aijun;Zhao Kun;Zhang Wansong;Beijing Key Laboratory of Optical Detection Technology for Oil and Gas;China University of Petroleum;College of Science;China University of Petroleum;
Zhao Chongyang;Xiang Wenfeng;Zhang Jiaqi;Wang Aijun;Zhao Kun;Zhang Wansong;Beijing Key Laboratory of Optical Detection Technology for Oil and Gas;China University of Petroleum;College of Science;China University of Petroleum;
..............page:757-760+778
Compactness of Silicon Oxide Films Prepared by ICPECVD at Low Temperature
Liu Yutao;Liang Ting;Zhang Rui;Wang Taolong;Wang Xinxin;Xiong Jijun;Key Laboratory of Instrumentation Science & Dynamic Measurement of Ministry of Education;North University of China;Science and Technology on Electronic Test and Measurement Laboratory;North University of China;
Liu Yutao;Liang Ting;Zhang Rui;Wang Taolong;Wang Xinxin;Xiong Jijun;Key Laboratory of Instrumentation Science & Dynamic Measurement of Ministry of Education;North University of China;Science and Technology on Electronic Test and Measurement Laboratory;North University of China;
..............page:761-764+785
A MEMS Thermocouple Vacuum Sensor with Wide Response Range
Lei Cheng;Mao Haiyang;Ou Wen;Xue Chenyang;Tang Licheng;Yang Tao;Chen Dapeng;Xiong Jijun;National Key Laboratory for Electronic Measurement Technology;North University of China;Smart Sensing R&D Center;Institute of Microelectronics;Chinese Academy of Sciences;Smart Sensor Engineering Center;Jiangsu R&D Center for Internet of Things;
Lei Cheng;Mao Haiyang;Ou Wen;Xue Chenyang;Tang Licheng;Yang Tao;Chen Dapeng;Xiong Jijun;National Key Laboratory for Electronic Measurement Technology;North University of China;Smart Sensing R&D Center;Institute of Microelectronics;Chinese Academy of Sciences;Smart Sensor Engineering Center;Jiangsu R&D Center for Internet of Things;
..............page:765-769+810
A Voltage-Controlled-Current-Source Model for Lamé-Mode Square Plate Resonators
Liang Bing;Song Yamei;Bao Jingfu;Li Xinyi;School of Electronic Engineering;University of Electronic Science and Technology of China;
Liang Bing;Song Yamei;Bao Jingfu;Li Xinyi;School of Electronic Engineering;University of Electronic Science and Technology of China;
..............page:770-778
Analysis of the Output Performance on a Micro Two-Degree-of-Freedom Bistable Vibration Energy Harvester
He Qing;Mao Xinhua;Chu Dongliang;Key Laboratory of Condition Monitoring and Control for Power Plant Equipment of Ministry of Education;North China Electric Power University;
He Qing;Mao Xinhua;Chu Dongliang;Key Laboratory of Condition Monitoring and Control for Power Plant Equipment of Ministry of Education;North China Electric Power University;
..............page:779-785
Micro Fabrication of X-Ray Lithography Mask and Piezoelectric Ceramic Based on Excimer Laser
Li Yigui;Yan Ping;Huang Yuan;Sugiyama Susumu;School of Science;Shanghai Institute of Technology;Department of Microsystem;Ritsumeikan University;
Li Yigui;Yan Ping;Huang Yuan;Sugiyama Susumu;School of Science;Shanghai Institute of Technology;Department of Microsystem;Ritsumeikan University;
..............page:786-790
Effect of the Chelating Agent on Copper Polishing in TSV CMP
Hong Jiao;Liu Yuling;Niu Xinhuan;Wang Chenwei;Yan Chenqi;Zhang Jin;Zhang Yan;Tianjin Key Laboratory of Electronic Materials and Devices;School of Electronic Information Engineering;Hebei University of Technology;
Hong Jiao;Liu Yuling;Niu Xinhuan;Wang Chenwei;Yan Chenqi;Zhang Jin;Zhang Yan;Tianjin Key Laboratory of Electronic Materials and Devices;School of Electronic Information Engineering;Hebei University of Technology;
..............page:791-794
Preparation and Characterization of Silicon-Based Magnetic Nano-SiO2 Microspheres
Ye Zi;Lin Wenzhang;Li Fan;Zhao Junjie;Lin Qing;School of Materials Engineering;Shanghai University of Engineering Science;
Ye Zi;Lin Wenzhang;Li Fan;Zhao Junjie;Lin Qing;School of Materials Engineering;Shanghai University of Engineering Science;
..............page:795-799
Ⅲ-Ⅴ Material Heterogrowth on Patterned Silicon Substrates
Lü Qifeng;Hong Wenting;Ma Liuhong;Wang Hao;Han Weihua;Yang Fuhua;Engineering Research Center for Semiconductor Integrated Technology;Institute of Semiconductors;Chinese Academy of Sciences;
Lü Qifeng;Hong Wenting;Ma Liuhong;Wang Hao;Han Weihua;Yang Fuhua;Engineering Research Center for Semiconductor Integrated Technology;Institute of Semiconductors;Chinese Academy of Sciences;
..............page:800-810
Effect of the pH Value in Alkaline Cleaning Solution on Benzotriazole Removal
Gu Zhangbing;Liu Yuling;Gao Baohong;Wang Chenwei;Deng Haiwen;Institute of Microelectronics;Hebei University of Technology;
Gu Zhangbing;Liu Yuling;Gao Baohong;Wang Chenwei;Deng Haiwen;Institute of Microelectronics;Hebei University of Technology;
..............page:811-814+744
..............page:815-816